Akshay V. Shah

Follow

Person

Berkeley Heights, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Etching of copper-containing devices
- Patent number 5,620,558
- Issue date Apr 15, 1997
- Lucent Technologies Inc.
- Karrie J. Hanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making circuit devices comprising a dielectric layer of s...
- Patent number 5,326,671
- Issue date Jul 5, 1994
- AT&T Bell Laboratories
- Paula J. Brown
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Etching of copper-containing devices
- Patent number 5,298,117
- Issue date Mar 29, 1994
- AT&T Bell Laboratories
- Karrie J. Hanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...