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Alain Poncet
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Saint-Martin-D'Heres, FR
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Patent Grant
Process for determining the focussing of a photolithographic apparatus
Patent number
5,043,236
Issue date
Aug 27, 1991
Etat Francais represente par le Ministre des Postes, Telecommunications et de...
Annie Tissier
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY