Number | Date | Country | Kind |
---|---|---|---|
88 17615 | Dec 1988 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
4774158 | Veavoordeldonic | Mar 1981 |
Number | Date | Country |
---|---|---|
0217463 | Mar 1978 | EPX |
Entry |
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Dill et al. Thermal Effects on the Photoresist AZ1350J, pp. 210-218, IBM Journal of Research Development vol. 21, No. 3, 5/1977. |
Kiyokatsu Jinno et al., "Baking Characteristics of Positive Photoresists" Photographic Science and Engineering, vol. 21, No. 5, Sep./Oct. 1977, pp. 290-292. |