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Alan D. BRODIE
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Palo Alto, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Segmented multi-channel, backside illuminated, solid state detector...
Patent number
11,699,607
Issue date
Jul 11, 2023
KLA Corporation
John Gerling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasmonic photocathode emitters at ultraviolet and visible wavelengths
Patent number
11,495,428
Issue date
Nov 8, 2022
KLA Corporation
Katerina Ioakeimidi
G02 - OPTICS
Information
Patent Grant
Defect inspection and review using transmissive current image of ch...
Patent number
11,410,830
Issue date
Aug 9, 2022
KLA Corporation
Hong Xiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam electron characterization tool with telecentric illumina...
Patent number
11,373,838
Issue date
Jun 28, 2022
KLA Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field curvature correction for multi-beam inspection systems
Patent number
11,302,511
Issue date
Apr 12, 2022
KLA Corporation
Alan Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrayed column detector
Patent number
11,239,048
Issue date
Feb 1, 2022
KLA Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for correcting arrayed astigmatism in a multi-...
Patent number
10,497,536
Issue date
Dec 3, 2019
Rockwell Collins, Inc.
Alan D. Brodie
G01 - MEASURING TESTING
Information
Patent Grant
Position feedback for multi-beam particle detector
Patent number
10,338,013
Issue date
Jul 2, 2019
KLA-Tencor Corporation
Alan D. Brodie
G01 - MEASURING TESTING
Information
Patent Grant
Reduced Coulomb interactions in a multi-beam column
Patent number
10,242,839
Issue date
Mar 26, 2019
KLA-Tencor Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Digital pattern generator having charge drain coating
Patent number
10,072,334
Issue date
Sep 11, 2018
KLA-Tencor Corporation
William M. Tong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Light-emitting device test systems
Patent number
9,874,597
Issue date
Jan 23, 2018
KLA-Tenor Corporation
Mark McCord
G01 - MEASURING TESTING
Information
Patent Grant
Charge drain coating for electron-optical MEMS
Patent number
9,824,851
Issue date
Nov 21, 2017
William M. Tong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and methods for electron beam lithography using array cat...
Patent number
9,715,995
Issue date
Jul 25, 2017
KLA-Tencor Corporation
Keith Standiford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pillar-supported array of micro electron lenses
Patent number
9,214,344
Issue date
Dec 15, 2015
KLA-Tencor Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam lithography with linear column array and rotary stage
Patent number
9,040,942
Issue date
May 26, 2015
KLA-Tencor Corporation
Keith Standiford
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact high-voltage electron gun
Patent number
8,957,394
Issue date
Feb 17, 2015
KLA-Tencor Corporation
Alan D. Brodie
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Electron microscope assembly for viewing the wafer plane image of a...
Patent number
8,642,981
Issue date
Feb 4, 2014
KLA-Tencor Corporation
Paul Petric
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Well-based dynamic pattern generator
Patent number
8,253,119
Issue date
Aug 28, 2012
KLA-Tencor Corporation
Alan D. Brodie
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Non-shot-noise-limited source for electron beam lithography or insp...
Patent number
8,063,365
Issue date
Nov 22, 2011
KLA-Tencor Corporation
Keith Standiford
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Contamination pinning for auger analysis
Patent number
7,855,362
Issue date
Dec 21, 2010
KLA-Tencor Technologies Corporation
Alan Brodie
G01 - MEASURING TESTING
Information
Patent Grant
Sharpening metal carbide emitters
Patent number
7,828,622
Issue date
Nov 9, 2010
KLA-Tencor Technologies Corporation
Alan Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sampling feedback system
Patent number
7,615,747
Issue date
Nov 10, 2009
KLA-Tencor Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for aberration-insensitive electron beam imaging
Patent number
7,405,402
Issue date
Jul 29, 2008
KLA-Tencor Technologies Corporation
Srinivas Vedula
G01 - MEASURING TESTING
Information
Patent Grant
High current density particle beam system
Patent number
7,335,894
Issue date
Feb 26, 2008
ICT Integrated Circuit Testing Gesselschaft
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for beam current fluctuation correction
Patent number
7,091,486
Issue date
Aug 15, 2006
KLA-Tencor Technologies Corporation
Mark A. McCord
G01 - MEASURING TESTING
Information
Patent Grant
Multi-beam multi-column electron beam inspection system
Patent number
6,977,375
Issue date
Dec 20, 2005
Multibeam Systems, Inc.
Edward M. Yin
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Multi-beam multi-column electron beam inspection system
Patent number
6,844,550
Issue date
Jan 18, 2005
Multibeam Systems, Inc.
Edward M. Yin
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Electron optics for multi-beam electron beam lithography tool
Patent number
6,617,587
Issue date
Sep 9, 2003
Multibeam Systems, Inc.
N. William Parker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Proximity effect correction method through uniform removal of fract...
Patent number
6,316,164
Issue date
Nov 13, 2001
N. William Parker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Inspecting optical masks with electron beam microscopy
Patent number
5,717,204
Issue date
Feb 10, 1998
KLA Instruments Corporation
Dan Meisburger
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEGMENTED MULTI-CHANNEL, BACKSIDE ILLUMINATED, SOLID STATE DETECTOR...
Publication number
20220399220
Publication date
Dec 15, 2022
KLA Corporation
John Gerling
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Arrayed Column Detector
Publication number
20210280386
Publication date
Sep 9, 2021
KLA Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMONIC PHOTOCATHODE EMITTERS AT ULTRAVIOLET AND VISIBLE WAVELENGTHS
Publication number
20200266019
Publication date
Aug 20, 2020
KLA Corporation
Katerina Ioakeimidi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-Beam Electron Characterization Tool with Telecentric Illumina...
Publication number
20200126752
Publication date
Apr 23, 2020
KLA-Tencor Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POSITION FEEDBACK FOR MULTI-BEAM PARTICLE DETECTOR
Publication number
20190227010
Publication date
Jul 25, 2019
KLA-Tencor Corporation
Alan D. Brodie
G01 - MEASURING TESTING
Information
Patent Application
Reduced Coulomb Interactions in a Multi-Beam Column
Publication number
20180323034
Publication date
Nov 8, 2018
KLA-Tencor Corporation
Alan D. Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Correcting Arrayed Astigmatism in a Multi-...
Publication number
20180068825
Publication date
Mar 8, 2018
KLA-Tencor Corporation
Alan D. Brodie
G01 - MEASURING TESTING
Information
Patent Application
DIGITAL PATTERN GENERATOR HAVING CHARGE DRAIN COATING
Publication number
20180037993
Publication date
Feb 8, 2018
William M. Tong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Field Curvature Correction for Multi-Beam Inspection Systems
Publication number
20170229279
Publication date
Aug 10, 2017
KLA-Tencor Corporation
Alan Brodie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGE DRAIN COATING FOR ELECTRON-OPTICAL MEMS
Publication number
20160358742
Publication date
Dec 8, 2016
William M. Tong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PILLAR-SUPPORTED ARRAY OF MICRO ELECTRON LENSES
Publication number
20150340195
Publication date
Nov 26, 2015
KLA-Tencor Corporation
Alan D. BRODIE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-EMITTING DEVICE TEST SYSTEMS
Publication number
20150316604
Publication date
Nov 5, 2015
KLA-Tencor Corporation
Mark MCCORD
G01 - MEASURING TESTING
Information
Patent Application
COMPACT HIGH-VOLTAGE ELECTRON GUN
Publication number
20130134324
Publication date
May 30, 2013
KLA-Tencor Corporation
Alan D. BRODIE
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
High current density particle beam system
Publication number
20060151711
Publication date
Jul 13, 2006
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron optics for multi-beam electron beam lithography tool
Publication number
20040119021
Publication date
Jun 24, 2004
Ion Diagnostics
N. William Parker
B82 - NANO-TECHNOLOGY
Information
Patent Application
ELECTRON OPTICS FOR MULTI-BEAM ELECTRON BEAM LITHOGRAPHY TOOL
Publication number
20030085360
Publication date
May 8, 2003
Multibeam Systems, Inc.
N. William Parker
B82 - NANO-TECHNOLOGY
Information
Patent Application
Multi-beam multi-column electron beam inspection system
Publication number
20020015143
Publication date
Feb 7, 2002
Edward M. Yin
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING