Alan E. Walter

Person

Exton, PA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Processes for treating electronic components
- Patent number 6,491,763
- Issue date Dec 10, 2002
- Mattson Technology IP
- Steven Verhaverbeke
- B08 - CLEANING
Information Patent Grant
Methods for treating objects
- Patent number 6,348,101
- Issue date Feb 19, 2002
- CFMT, Inc.
- Alan E. Walter
- B08 - CLEANING
Information Patent Grant
Methods for treating objects
- Patent number 6,143,087
- Issue date Nov 7, 2000
- CFMT, Inc.
- Alan E. Walter
- B08 - CLEANING
Information Patent Grant
Apparatus for rinsing and drying surfaces
- Patent number 4,984,597
- Issue date Jan 15, 1991
- CFM Technologies Research Associates
- Christopher F. McConnell
- B08 - CLEANING
Information Patent Grant
Apparatus for treating wafers with process fluids
- Patent number 4,917,123
- Issue date Apr 17, 1990
- CFM Technologies Limited Partnership
- Christopher F. McConnell
- B08 - CLEANING
Information Patent Grant
Process and apparatus for drying surfaces
- Patent number 4,911,761
- Issue date Mar 27, 1990
- CFM Technologies Research Associates
- Christopher F. McConnell
- B08 - CLEANING
Information Patent Grant
Method and system for fluid treatment of semiconductor wafers
- Patent number 4,899,767
- Issue date Feb 13, 1990
- CFM Technologies, Inc.
- Christopher F. McConnell
- B08 - CLEANING
Information Patent Grant
Method and system for fluid treatment of semiconductor wafers
- Patent number 4,795,497
- Issue date Jan 3, 1989
- Christopher F. McConnell
- B08 - CLEANING
Information Patent Grant
Process and apparatus for treating wafers with process fluids
- Patent number 4,778,532
- Issue date Oct 18, 1988
- CFM Technologies Limited Partnership
- Christopher F. McConnell
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for treating semiconductor wafers
- Patent number 4,633,893
- Issue date Jan 6, 1987
- CFM Technologies Limited Partnership
- Christopher F. McConnell
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for removing trace amounts of liquid from subs...
- Publication number 20070094885
- Publication date May 3, 2007
- Alan Walter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for processing substrates with sonic energy that...
- Publication number 20060260638
- Publication date Nov 23, 2006
- Pejman Fani
- B08 - CLEANING
Information Patent Application
Method and system for processing substrates with sonic energy that...
- Publication number 20060260639
- Publication date Nov 23, 2006
- Pejman Fani
- B08 - CLEANING
Information Patent Application
Method and apparatus for creating ozonated process solutions having...
- Publication number 20060021634
- Publication date Feb 2, 2006
- Zhi (Lewis) Liu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
System and method for pre-gate cleaning of substrates
- Publication number 20060011214
- Publication date Jan 19, 2006
- Zhi (Lewis) Liu
- B08 - CLEANING
Information Patent Application
Processes and apparatus for treating electronic components
- Publication number 20020033186
- Publication date Mar 21, 2002
- Steven Verhaverbeke
- H01 - BASIC ELECTRIC ELEMENTS

Alan E. Walter

Person

Patents Grantslast 30 patents

Processes for treating electronic components

Methods for treating objects

Methods for treating objects

Apparatus for rinsing and drying surfaces

Apparatus for treating wafers with process fluids

Process and apparatus for drying surfaces

Method and system for fluid treatment of semiconductor wafers

Method and system for fluid treatment of semiconductor wafers

Process and apparatus for treating wafers with process fluids

Apparatus for treating semiconductor wafers

Patents Applicationslast 30 patents

Apparatus and method for removing trace amounts of liquid from subs...

Method and system for processing substrates with sonic energy that...

Method and system for processing substrates with sonic energy that...

Method and apparatus for creating ozonated process solutions having...

System and method for pre-gate cleaning of substrates

Processes and apparatus for treating electronic components