Alan Tso

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems to enhance process uniformity
- Patent number 11,637,002
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for verification and re-use of process fluids
- Patent number 11,609,505
- Issue date Mar 21, 2023
- Applied Materials, Inc.
- Mangesh Ashok Bangar
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems to enhance process uniformity
- Patent number 11,239,061
- Issue date Feb 1, 2022
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution blocker apparatus
- Patent number 9,714,465
- Issue date Jul 25, 2017
- Applied Materials, Inc.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for fabricating silicon heterojunction solar c...
- Patent number 8,728,918
- Issue date May 20, 2014
- Applied Materials, Inc.
- Shuran Sheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS
- Publication number 20240160117
- Publication date May 16, 2024
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING
- Publication number 20230161260
- Publication date May 25, 2023
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR VERIFICATION AND RE-USE OF PROCESS FLUIDS
- Publication number 20220317579
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Mangesh Ashok BANGAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD TO REDUCE PARTICLE FORMATION ON SUBSTRATES IN...
- Publication number 20180254203
- Publication date Sep 6, 2018
- Applied Materials, Inc.
- Saravjeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY
- Publication number 20170229291
- Publication date Aug 10, 2017
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY
- Publication number 20160148821
- Publication date May 26, 2016
- Applied Materials, Inc.
- Saravjeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PROCESSING FOR MICROCONTAMINATION PREVENTION
- Publication number 20160068969
- Publication date Mar 10, 2016
- Zhenjiang Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FABRICATING SILICON HETEROJUNCTION SOLAR C...
- Publication number 20130102133
- Publication date Apr 25, 2013
- Applied Materials, Inc.
- Shuran Sheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR REMOTE PLASMA SOURCE ASSISTED SILICON-CONT...
- Publication number 20130012030
- Publication date Jan 10, 2013
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINI BLOCKER PLATE WITH STANDOFF SPACERS
- Publication number 20130004681
- Publication date Jan 3, 2013
- Applied Materials, Inc.
- Alan Tso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE HYDROGEN PLASMA SOURCE OF SILICON CONTAINING FILM DEPOSITION
- Publication number 20120171852
- Publication date Jul 5, 2012
- APPLIED MATERIALS, INC.
- Zheng Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION BLOCKER APPARATUS
- Publication number 20100136216
- Publication date Jun 3, 2010
- Applied Materials, Inc.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF RF RETURNING STRAPS FOR UNIFORMITY CONTROL
- Publication number 20100136261
- Publication date Jun 3, 2010
- Applied Materials, Inc.
- Alan Tso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTABLE GAS DISTRIBUTION APPARATUS
- Publication number 20100112212
- Publication date May 6, 2010
- Applied Materials, Inc.
- Lin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE GAS FEED APPARATUS AND METHOD
- Publication number 20100104754
- Publication date Apr 29, 2010
- Applied Materials, Inc.
- ALAN TSO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Methods and systems to enhance process uniformity

Apparatus and methods for verification and re-use of process fluids

Methods and systems to enhance process uniformity

Gas distribution blocker apparatus

Method and apparatus for fabricating silicon heterojunction solar c...

Patents Applicationslast 30 patents

PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS

CHAMBER AND METHODS OF COOLING A SUBSTRATE AFTER BAKING

APPARATUS AND METHODS FOR VERIFICATION AND RE-USE OF PROCESS FLUIDS

APPARATUS AND METHOD TO REDUCE PARTICLE FORMATION ON SUBSTRATES IN...

METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY

METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY

INTEGRATED PROCESSING FOR MICROCONTAMINATION PREVENTION

METHOD AND APPARATUS FOR FABRICATING SILICON HETEROJUNCTION SOLAR C...

METHOD AND APPARATUS FOR REMOTE PLASMA SOURCE ASSISTED SILICON-CONT...

MINI BLOCKER PLATE WITH STANDOFF SPACERS

REMOTE HYDROGEN PLASMA SOURCE OF SILICON CONTAINING FILM DEPOSITION

GAS DISTRIBUTION BLOCKER APPARATUS

MODULATION OF RF RETURNING STRAPS FOR UNIFORMITY CONTROL

ADJUSTABLE GAS DISTRIBUTION APPARATUS

MULTIPLE GAS FEED APPARATUS AND METHOD