Albert Kreh

Person

Solms, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,451,440
- Issue date May 28, 2013
- KLA-Tencor MIE GmbH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a surface
- Patent number 7,602,481
- Issue date Oct 13, 2009
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Method for optically inspecting a wafer by sequentially illuminatin...
- Patent number 7,460,219
- Issue date Dec 2, 2008
- Vistec Semiconductor Systems GmbH
- Paul-Gottfried Jung
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection device
- Patent number 7,424,393
- Issue date Sep 9, 2008
- Vistec Semiconductor Systems GmbH
- Michael Halama
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspection of a wafer
- Patent number 7,327,450
- Issue date Feb 5, 2008
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspection of a wafer
- Patent number 7,307,713
- Issue date Dec 11, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspection of a wafer
- Patent number 7,292,328
- Issue date Nov 6, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
System for the detection of macrodefects
- Patent number 7,265,823
- Issue date Sep 4, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for inspection of a wafer
- Patent number 7,248,354
- Issue date Jul 24, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus, method, and computer program for wafer inspection
- Patent number 7,224,446
- Issue date May 29, 2007
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for wafer inspection
- Patent number 7,180,585
- Issue date Feb 20, 2007
- Leica Microsystems Semiconductor GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Grant
Autofocus module for microscope-based systems
- Patent number 6,875,972
- Issue date Apr 5, 2005
- Leica Microsystems Wetzlar GmbH
- Albert Kreh
- G02 - OPTICS
Information Patent Grant
Autofocus module for microscope-based systems
- Patent number 6,812,446
- Issue date Nov 2, 2004
- Leica Microsystems Semiconductor GmbH
- Albert Kreh
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for the Optical Inspection of Wafers
- Publication number 20100295938
- Publication date Nov 25, 2010
- KLA-TENCOR MIE GMBH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting a surface
- Publication number 20080174780
- Publication date Jul 24, 2008
- Vistec Semiconductor Systems GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Method and device for inspecting a wafer
- Publication number 20070064224
- Publication date Mar 22, 2007
- Albert Kreh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Wafer inspection device
- Publication number 20070040241
- Publication date Feb 22, 2007
- Michael Halama
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for Inspecting a Wafer
- Publication number 20070013902
- Publication date Jan 18, 2007
- Vistec Semiconductor Systems GmbH
- Henning Backhauss
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting semiconductor wafers taking the SAW design int...
- Publication number 20060279729
- Publication date Dec 14, 2006
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for inspecting a wafer
- Publication number 20060262295
- Publication date Nov 23, 2006
- Vistec Semiconductor Systems GmbH
- Henning Backhauss
- G01 - MEASURING TESTING
Information Patent Application
Method and system for inspecting a wafer
- Publication number 20050280807
- Publication date Dec 22, 2005
- Leica Microsystems Semiconductor GmbH
- Henning Backhauss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and system for inspecting a wafer
- Publication number 20050280808
- Publication date Dec 22, 2005
- Leica Microsystems Semiconductor GmbH
- Henning Backhauss
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting a wafer
- Publication number 20050168729
- Publication date Aug 4, 2005
- Leica Microsystems Semiconductor GmbH
- Paul Jung
- G01 - MEASURING TESTING
Information Patent Application
Method for inspection of a wafer
- Publication number 20050134839
- Publication date Jun 23, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for inspection of a wafer
- Publication number 20050134846
- Publication date Jun 23, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
System for the detection of macrodefects
- Publication number 20050101036
- Publication date May 12, 2005
- LEICA MICROSYSTEMS
- Albert Kreh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for inspection of a wafer
- Publication number 20050002023
- Publication date Jan 6, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus, method, and computer program for wafer inspection
- Publication number 20050002021
- Publication date Jan 6, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspection of a wafer
- Publication number 20050001900
- Publication date Jan 6, 2005
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for wafer inspection
- Publication number 20040239920
- Publication date Dec 2, 2004
- LEICA MICROSYSTEMS SEMICONDUCTOR GmbH
- Albert Kreh
- G01 - MEASURING TESTING
Information Patent Application
Autofocus module for microscope-based systems
- Publication number 20040135061
- Publication date Jul 15, 2004
- Albert Kreh
- G02 - OPTICS
Information Patent Application
Autofocus module for microscope-based systems
- Publication number 20040124334
- Publication date Jul 1, 2004
- Albert Kreh
- G02 - OPTICS

Albert Kreh

Person

Patents Grantslast 30 patents

Apparatus for the optical inspection of wafers

Method and apparatus for inspecting a surface

Method for optically inspecting a wafer by sequentially illuminatin...

Wafer inspection device

Apparatus for inspection of a wafer

Apparatus and method for inspection of a wafer

Method for inspection of a wafer

System for the detection of macrodefects

Apparatus for inspection of a wafer

Apparatus, method, and computer program for wafer inspection

Apparatus for wafer inspection

Autofocus module for microscope-based systems

Autofocus module for microscope-based systems

Patents Applicationslast 30 patents

Apparatus for the Optical Inspection of Wafers

Method and apparatus for inspecting a surface

Method and device for inspecting a wafer

Wafer inspection device

Apparatus for Inspecting a Wafer

Method of inspecting semiconductor wafers taking the SAW design int...

Apparatus and method for inspecting a wafer

Method and system for inspecting a wafer

Method and system for inspecting a wafer

Method for inspecting a wafer

Method for inspection of a wafer

Apparatus and method for inspection of a wafer

System for the detection of macrodefects

Apparatus for inspection of a wafer

Apparatus, method, and computer program for wafer inspection

Apparatus for inspection of a wafer

Apparatus for wafer inspection

Autofocus module for microscope-based systems

Autofocus module for microscope-based systems