Albrecht Ehrmann

Person

Aalen-Ebnat, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus for measuring a wavefront aberration of an im...
- Patent number 11,441,970
- Issue date Sep 13, 2022
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G02 - OPTICS
Information Patent Grant
Microlithographic projection exposure apparatus and measuring devic...
- Patent number 10,345,710
- Issue date Jul 9, 2019
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for determining an optical property of an optical imaging...
- Patent number 10,006,807
- Issue date Jun 26, 2018
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 9,436,095
- Issue date Sep 6, 2016
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 9,429,495
- Issue date Aug 30, 2016
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,836,929
- Issue date Sep 16, 2014
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,823,948
- Issue date Sep 2, 2014
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,488,127
- Issue date Jul 16, 2013
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and measuring device for a projection lens
- Patent number 8,330,935
- Issue date Dec 11, 2012
- Carl Zeiss SMT GmbH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system of a microlithographic projection exposure apparatus
- Patent number 8,212,991
- Issue date Jul 3, 2012
- Carl Zeiss SMT GmbH
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,120,763
- Issue date Feb 21, 2012
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,796,274
- Issue date Sep 14, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,760,366
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 7,408,652
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS FOR MEASURING A WAVEFRONT ABERRATION OF AN IM...
- Publication number 20200003655
- Publication date Jan 2, 2020
- Carl Zeiss SMT GMBH
- Albrecht EHRMANN
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20170082930
- Publication date Mar 23, 2017
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL IMAGING...
- Publication number 20160202118
- Publication date Jul 14, 2016
- Carl Zeiss SMT GMBH
- Albrecht EHRMANN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20140347654
- Publication date Nov 27, 2014
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20140022524
- Publication date Jan 23, 2014
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20130293869
- Publication date Nov 7, 2013
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20130120723
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20120113429
- Publication date May 10, 2012
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20100315651
- Publication date Dec 16, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
- Publication number 20100141912
- Publication date Jun 10, 2010
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20100073655
- Publication date Mar 25, 2010
- Carl Zeiss SMT AG
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090257049
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090021726
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20080309904
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20080309894
- Publication date Dec 18, 2008
- Carl Zeiss SMT AG
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for Measuring the Image Quality of an Optical Imaging System
- Publication number 20080252876
- Publication date Oct 16, 2008
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20080180688
- Publication date Jul 31, 2008
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
Optical System of a Microlithographic Projection Exposure Apparatus
- Publication number 20080170217
- Publication date Jul 17, 2008
- Carl Zeiss SMT AG
- Aurelian Dodoc
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...
- Publication number 20070070316
- Publication date Mar 29, 2007
- Albrecht Ehrmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for the optical measurement of an optical system,...
- Publication number 20050243328
- Publication date Nov 3, 2005
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Albrecht Ehrmann

Person

Patents Grantslast 30 patents

Measurement apparatus for measuring a wavefront aberration of an im...

Microlithographic projection exposure apparatus and measuring devic...

Apparatus for determining an optical property of an optical imaging...

Exposure apparatus and measuring device for a projection lens

System for measuring the image quality of an optical imaging system

Device and method for the optical measurement of an optical system...

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Exposure apparatus and measuring device for a projection lens

Optical system of a microlithographic projection exposure apparatus

Device and method for the optical measurement of an optical system...

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Device and method for the optical measurement of an optical system...

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS FOR MEASURING A WAVEFRONT ABERRATION OF AN IM...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

APPARATUS FOR DETERMINING AN OPTICAL PROPERTY OF AN OPTICAL IMAGING...

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

System for Measuring the Image Quality of an Optical Imaging System

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

Optical System of a Microlithographic Projection Exposure Apparatus

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVIC...

Device and method for the optical measurement of an optical system,...