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Aleksander Owzarz
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
CMP belt stretch compensation apparatus and methods for using the same
Patent number
6,878,048
Issue date
Apr 12, 2005
Lam Research Corporation
Yehiel Gotkis
B24 - GRINDING POLISHING
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Patent Grant
CMP belt stretch compensation apparatus and methods for using the same
Patent number
6,749,491
Issue date
Jun 15, 2004
Lam Research Corporation
Yehiel Gotkis
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
CMP belt stretch compensation apparatus and methods for using the same
Publication number
20040224610
Publication date
Nov 11, 2004
Lam Research Corp.
Yehiel Gotkis
B24 - GRINDING POLISHING