Claims
- 1. In a chemical mechanical planarization (CMP) system, an apparatus for reducing non-uniform stretch of a belt used in the CMP system, the belt extending between a first roller and a second roller to define a belt loop with an inner surface and an outer surface to be used for CMP, the apparatus comprising:
a first compensating roller positioned inside of the belt loop, and the first compensating roller being configured to be applied to the inner surface of the belt loop so as to press against a first edge of the belt; and a second compensating roller positioned inside of the belt loop, the second compensating roller being configured to be applied to the inner surface of the belt loop so as to press against a second edge of the belt; wherein the application of the first compensating roller and the second compensating roller to the inner surface of the belt loop reduces non-uniform stretch of the belt.
- 2. In a chemical mechanical planarization (CMP) system, an apparatus for reducing non-uniform stretch of a belt used in the CMP system as recited in claim 1, wherein the application of the first compensating roller to the inner surface of the belt loop and the application of the second compensating roller to the inner surface of the belt loop are controlled independently of each other.
- 3. In a chemical mechanical planarization (CMP) system, an apparatus for reducing non-uniform stretch of a belt used in the CMP system as recited in claim 1, further comprising:
a force applicator, the force applicator being configured to supply a pressing motion to push the first compensating roller and the second compensating roller against the belt.
- 4. In a chemical mechanical planarization (CMP) system, an apparatus for reducing non-uniform stretch of a belt used in the CMP system as recited in claim 1, wherein the first compensating roller and the second compensating roller are made from one of a hard rubber material and a polyurethane material.
CROSS REFERENCE TO RELATED APPLICATION
[0001] This application is a divisional of U.S. application Ser. No. 10/033,501, filed Dec. 26, 2001. The disclosure of this parent application, from which priority under U.S.C. § 120 is claimed, is incorporated herein by reference
Divisions (1)
|
Number |
Date |
Country |
Parent |
10033501 |
Dec 2001 |
US |
Child |
10864031 |
Jun 2004 |
US |