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Alex Buxbaum
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San Ramon, CA, US
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last 30 patents
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Patent Grant
Method for measuring a sample and microscope implementing the method
Patent number
11,848,172
Issue date
Dec 19, 2023
Carl Zeiss SMT GmbH
Dmitry Klochkov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...
Publication number
20240328970
Publication date
Oct 3, 2024
Carl Zeiss SMT GMBH
Dmitry Klochkov
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
Publication number
20240311698
Publication date
Sep 19, 2024
Carl Zeiss SMT GMBH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...
Publication number
20230343619
Publication date
Oct 26, 2023
Carl Zeiss SMT GMBH
Hans-Michael Stiepan
G01 - MEASURING TESTING
Information
Patent Application
TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...
Publication number
20230267627
Publication date
Aug 24, 2023
Carl Zeiss SMT GMBH
Thomas Korb
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
Publication number
20230196189
Publication date
Jun 22, 2023
Carl Zeiss SMT GMBH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
Publication number
20230145897
Publication date
May 11, 2023
Carl Zeiss SMT GMBH
Dmitry Klochkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
Publication number
20220392793
Publication date
Dec 8, 2022
Carl Zeiss SMT GMBH
Alex Buxbaum
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CONTACT AREA SIZE DETERMINATION BETWEEN 3D STRUCTURES IN AN INTEGRA...
Publication number
20220230899
Publication date
Jul 21, 2022
Carl Zeiss SMT GMBH
Alex Buxbaum
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures
Publication number
20220223445
Publication date
Jul 14, 2022
Carl Zeiss SMT GMBH
Amir Avishai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...
Publication number
20220138973
Publication date
May 5, 2022
Carl Zeiss SMT GMBH
Thomas Korb
G06 - COMPUTING CALCULATING COUNTING