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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
Patent number
11,915,912
Issue date
Feb 27, 2024
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for cooling RF heated chamber components
Patent number
11,887,819
Issue date
Jan 30, 2024
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for reverse pulsing
Patent number
11,798,785
Issue date
Oct 24, 2023
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Direct frequency tuning for matchless plasma source in substrate pr...
Patent number
11,728,137
Issue date
Aug 15, 2023
Lam Research Corporation
Yuhou Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF pulsing within pulsing for semiconductor RF plasma processing
Patent number
11,728,136
Issue date
Aug 15, 2023
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
11,716,805
Issue date
Aug 1, 2023
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Air cooled faraday shield and methods for using the same
Patent number
11,692,732
Issue date
Jul 4, 2023
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Moveable edge coupling ring for edge process control during semicon...
Patent number
11,605,546
Issue date
Mar 14, 2023
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
Patent number
11,569,067
Issue date
Jan 31, 2023
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone cooling of plasma heated window
Patent number
11,538,666
Issue date
Dec 27, 2022
Lam Research Corporation
Yiting Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for cooling RF heated chamber components
Patent number
11,495,441
Issue date
Nov 8, 2022
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-level parameter and frequency pulsing with a low angular spread
Patent number
11,462,390
Issue date
Oct 4, 2022
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Frequency tuning for a matchless plasma source
Patent number
11,437,219
Issue date
Sep 6, 2022
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control of on-wafer cd uniformity with movable edge ring and gas in...
Patent number
11,424,103
Issue date
Aug 23, 2022
Lam Research Corporation
Yiting Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching isolation features and dense features within a substrate
Patent number
11,398,387
Issue date
Jul 26, 2022
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF pulsing within pulsing for semiconductor RF plasma processing
Patent number
11,342,159
Issue date
May 24, 2022
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matchless plasma source for semiconductor wafer fabrication
Patent number
11,224,116
Issue date
Jan 11, 2022
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Internal plasma grid for semiconductor fabrication
Patent number
11,171,021
Issue date
Nov 9, 2021
Lam Research Corporation
Harmeet Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for removing and replacing consumable parts from a semicond...
Patent number
11,112,773
Issue date
Sep 7, 2021
Lam Research Corporation
David D. Trussell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal contamination reduction in substrate processing systems with...
Patent number
11,056,321
Issue date
Jul 6, 2021
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for achieving peak ion energy enhancement with...
Patent number
11,049,693
Issue date
Jun 29, 2021
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monoenergetic ion generation for controlled etch
Patent number
11,011,351
Issue date
May 18, 2021
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image based plasma sheath profile detection on plasma processing tools
Patent number
10,957,521
Issue date
Mar 23, 2021
Lam Research Corporation
Yuhou Wang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Integrated atomic layer passivation in TCP etch chamber and in-situ...
Patent number
10,950,454
Issue date
Mar 16, 2021
Lam Research Corporation
Xiang Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Auxiliary circuit in RF matching network for frequency tuning assis...
Patent number
10,879,044
Issue date
Dec 29, 2020
Lam Research Corporation
Yuhou Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Direct drive RF circuit for substrate processing systems
Patent number
10,847,345
Issue date
Nov 24, 2020
Lam Research Corporation
Maolin Long
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Systems for cooling RF heated chamber components
Patent number
10,825,661
Issue date
Nov 3, 2020
Lam Research Corporation
Jon McChesney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF voltage sensor incorporating multiple voltage dividers for detec...
Patent number
10,784,083
Issue date
Sep 22, 2020
Lam Research Corporation
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated replacement of consumable parts using interfacing chambers
Patent number
10,770,339
Issue date
Sep 8, 2020
Lam Research Corporation
Damon Tyrone Genetti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-level pulsing of DC and RF signals
Patent number
10,755,896
Issue date
Aug 25, 2020
Lam Research Corporation
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
Publication number
20240162005
Publication date
May 16, 2024
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR REVERSE PULSING
Publication number
20240030000
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
Publication number
20230360883
Publication date
Nov 9, 2023
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION
Publication number
20230354502
Publication date
Nov 2, 2023
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSING RF COILS OF A PLASMA CHAMBER IN REVERSE SYNCHRONIZATION
Publication number
20230282448
Publication date
Sep 7, 2023
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYNCHRONIZATION OF RF GENERATORS
Publication number
20230274913
Publication date
Aug 31, 2023
LAM RESEARCH CORPORATION
Ying Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID LIQUID/AIR COOLING SYSTEM FOR TCP WINDOWS
Publication number
20230245854
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Andrea ALBERTI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Protection System for Switches in Direct Drive Circuits of Substrat...
Publication number
20230245873
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYNCHRONIZATION OF RF PULSING SCHEMES AND OF SENSOR DATA COLLECTION
Publication number
20230230805
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
John Stephen Drewery
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Controlling Radiofrequency Pulse-Initiation...
Publication number
20230154728
Publication date
May 18, 2023
LAM RESEARCH CORPORATION
Ying Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC WINDOW FOR SUBSTRATE PROCESSING CHAMBER
Publication number
20230126058
Publication date
Apr 27, 2023
LAM RESEARCH CORPORATION
Maolin LONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
Publication number
20230124201
Publication date
Apr 20, 2023
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONE COOLING OF PLASMA HEATED WINDOW
Publication number
20230121097
Publication date
Apr 20, 2023
LAM RESEARCH CORPORATION
Yiting ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
Publication number
20230039721
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Jon MCCHESNEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-LEVEL PARAMETER AND FREQUENCY PULSING WITH A LOW ANGULAR SPREAD
Publication number
20230005718
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE
Publication number
20220319856
Publication date
Oct 6, 2022
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20220285136
Publication date
Sep 8, 2022
LAM RESEARCH CORPORATION
Hui Ling HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF PULSING WITHIN PULSING FOR SEMICONDUCTOR RF PLASMA PROCESSING
Publication number
20220254608
Publication date
Aug 11, 2022
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL-FREQUENCY, DIRECT-DRIVE INDUCTIVELY COUPLED PLASMA SOURCE
Publication number
20220199365
Publication date
Jun 23, 2022
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and System for Automated Frequency Tuning of Radiofrequency...
Publication number
20220189738
Publication date
Jun 16, 2022
LAM RESEARCH CORPORATION
Mathew Evans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE SILICON DIOXIDE REMOVAL USING LOW PRESSURE LOW BIAS DEUTE...
Publication number
20220148852
Publication date
May 12, 2022
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE LOCATION DETECTION AND ADJUSTMENT
Publication number
20220126454
Publication date
Apr 28, 2022
LAM RESEARCH CORPORATION
Michael John Martin
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
MATCHLESS PLASMA SOURCE FOR SEMICONDUCTOR WAFER FABRICATION
Publication number
20220117074
Publication date
Apr 14, 2022
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING ISOLATION FEATURES AND DENSE FEATURES WITHIN A SUBSTRATE
Publication number
20210358757
Publication date
Nov 18, 2021
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH...
Publication number
20210327689
Publication date
Oct 21, 2021
LAM RESEARCH CORPORATION
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR ACHIEVING PEAK ION ENERGY ENHANCEMENT WITH...
Publication number
20210313149
Publication date
Oct 7, 2021
LAM RESEARCH CORPORATION
Juline Shoeb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED ATOMIC LAYER PASSIVATION IN TCP ETCH CHAMBER AND IN-SITU...
Publication number
20210287909
Publication date
Sep 16, 2021
LAM RESEARCH CORPORATION
Xiang Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECT FREQUENCY TUNING FOR MATCHLESS PLASMA SOURCE IN SUBSTRATE PR...
Publication number
20210210314
Publication date
Jul 8, 2021
LAM RESEARCH CORPORATION
Yuhou WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
Publication number
20210183687
Publication date
Jun 17, 2021
LAM RESEARCH CORPORATION
Haoquan Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
Publication number
20210050188
Publication date
Feb 18, 2021
LAM RESEARCH CORPORATION
Jon MCCHESNEY
H01 - BASIC ELECTRIC ELEMENTS