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Alex Salnik
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and methods for combined brightfield, darkfield, and phot...
Patent number
10,533,954
Issue date
Jan 14, 2020
KLA-Tencor Corporation
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and methods for combined brightfield, darkfield, and phot...
Patent number
9,772,297
Issue date
Sep 26, 2017
KLA-Tencor Corporation
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Gas refraction compensation for laser-sustained plasma bulbs
Patent number
9,232,622
Issue date
Jan 5, 2016
KLA-Tencor Corporation
Ilya Bezel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Dopant metrology with information feedforward and feedback
Patent number
8,962,351
Issue date
Feb 24, 2015
KLA-Tencor Corporation
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Gas refraction compensation for laser-sustained plasma bulbs
Patent number
8,853,655
Issue date
Oct 7, 2014
KLA-Tencor Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulated reflectance measurement system using UV probe
Patent number
8,817,260
Issue date
Aug 26, 2014
KLA-Tencor Corporation
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Grant
Dopant metrology with information feedforward and feedback
Patent number
8,535,957
Issue date
Sep 17, 2013
KLA-Tencor Corporation
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
LED solar illuminator
Patent number
8,436,554
Issue date
May 7, 2013
KLA-Tencor Corporation
Guoheng Zhao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Measuring sheet resistance and other properties of a semiconductor
Patent number
8,415,961
Issue date
Apr 9, 2013
KLA-Tencor Corporation
Guoheng Zhao
G01 - MEASURING TESTING
Information
Patent Grant
Measuring characteristics of ultra-shallow junctions
Patent number
8,120,776
Issue date
Feb 21, 2012
KLA-Tencor Corporation
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Methods for depth profiling in semiconductors using modulated optic...
Patent number
7,982,867
Issue date
Jul 19, 2011
KLA-Tencor Corporation
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Methods for depth profiling in semiconductors using modulated optic...
Patent number
7,705,977
Issue date
Apr 27, 2010
KLA-Tencor Corporation
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system using UV probe
Patent number
7,646,486
Issue date
Jan 12, 2010
KLA-Tencor Corporation
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system with multiple wavelengths
Patent number
7,619,741
Issue date
Nov 17, 2009
KLA-Tencor Corp.
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Probe beam profile modulated optical reflectance system and methods
Patent number
7,502,104
Issue date
Mar 10, 2009
KLA-Tencor Corporation
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Combined modulated optical reflectance and electrical system for ul...
Patent number
7,499,168
Issue date
Mar 3, 2009
KLA-Tencor Corp.
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system with multiple wavelengths
Patent number
7,423,757
Issue date
Sep 9, 2008
KLA-Tencor Corporation
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring peak carrier concentration in ultra-shallow ju...
Patent number
7,403,022
Issue date
Jul 22, 2008
KLA-Tencor, Inc.
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system using UV probe
Patent number
7,362,441
Issue date
Apr 22, 2008
KLA-Tencor Corporation
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring ion-implanted semiconductors with improved rep...
Patent number
7,330,260
Issue date
Feb 12, 2008
KLA-Tencor Corporation
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Photothermal system with spectroscopic pump and probe
Patent number
7,280,215
Issue date
Oct 9, 2007
Therma-Wave, Inc.
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Characterization of ultra shallow junctions in semiconductor wafers
Patent number
7,248,367
Issue date
Jul 24, 2007
Therma-Wave, Inc.
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Position modulated optical reflectance measurement system for semic...
Patent number
7,212,288
Issue date
May 1, 2007
Therma-Wave, Inc.
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system using UV probe
Patent number
7,126,690
Issue date
Oct 24, 2006
Therma-Wave, Inc.
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system with multiple wavelengths
Patent number
7,116,424
Issue date
Oct 3, 2006
Therma-Wave, Inc.
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system with multiple wavelengths
Patent number
7,106,446
Issue date
Sep 12, 2006
Therma-Wave, Inc.
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Modulated reflectance measurement system with fiber laser technology
Patent number
7,079,249
Issue date
Jul 18, 2006
Therma-Wave, Inc.
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for combined photothermal modulated reflectance a...
Patent number
7,060,980
Issue date
Jun 13, 2006
Therma-Wave, Inc.
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Grant
Ion implant monitoring through measurement of modulated optical res...
Patent number
7,002,690
Issue date
Feb 21, 2006
Therma-Wave, Inc.
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Grant
Ion implant monitoring through measurement of modulated optical res...
Patent number
6,989,899
Issue date
Jan 24, 2006
Therma-Wave, Inc.
Alex Salnik
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
Publication number
20180003648
Publication date
Jan 4, 2018
KLA-Tencor Corporation
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
Publication number
20150226676
Publication date
Aug 13, 2015
KLA-Tencor Corporation
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS
Publication number
20140367592
Publication date
Dec 18, 2014
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS
Publication number
20140239202
Publication date
Aug 28, 2014
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LED Solar Illuminator
Publication number
20120256559
Publication date
Oct 11, 2012
KLA-Tencor Corporation
Guoheng Zhao
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHODS FOR DEPTH PROFILING IN SEMICONDUCTORS USING MODULATED OPTIC...
Publication number
20100315625
Publication date
Dec 16, 2010
KLA-Tencor Corporation
Alex SALNIK
G01 - MEASURING TESTING
Information
Patent Application
MODULATED REFLECTANCE MEASUREMENT SYSTEM USING UV PROBE
Publication number
20100134785
Publication date
Jun 3, 2010
KLA-Tencor Corp.
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Application
MODULATED REFLECTANCE MEASUREMENT SYSTEM WITH MULTIPLE WAVELENGTHS
Publication number
20080309943
Publication date
Dec 18, 2008
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
MODULATED REFLECTANCE MEASUREMENT SYSTEM USING UV PROBE
Publication number
20080158565
Publication date
Jul 3, 2008
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Application
Methods for depth profiling in semiconductors using modulated optic...
Publication number
20080151247
Publication date
Jun 26, 2008
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Modulated optical reflectance measurement system with enhanced sens...
Publication number
20080074668
Publication date
Mar 27, 2008
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Probe beam profile modulated optical reflectance system and methods
Publication number
20080036998
Publication date
Feb 14, 2008
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Combined modulated optical reflectance and electrical system for ul...
Publication number
20070188761
Publication date
Aug 16, 2007
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Modulated reflectance measurement system using UV probe
Publication number
20070008541
Publication date
Jan 11, 2007
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Application
Modulated reflectance measurement system with multiple wavelengths
Publication number
20060262314
Publication date
Nov 23, 2006
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
Method for measuring peak carrier concentration in ultra-shallow ju...
Publication number
20060166385
Publication date
Jul 27, 2006
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Modulated reflectance measurement system with multiple wavelengths
Publication number
20060092425
Publication date
May 4, 2006
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
Method for measuring ion-implanted semiconductors with improved rep...
Publication number
20050195399
Publication date
Sep 8, 2005
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
Ion implant monitoring through measurement of modulated optical res...
Publication number
20050190369
Publication date
Sep 1, 2005
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
ION implant monitoring through measurement of modulated optical res...
Publication number
20050083528
Publication date
Apr 21, 2005
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Photothermal system with spectroscopic pump and probe
Publication number
20050062971
Publication date
Mar 24, 2005
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Position modulated optical reflectance measurement system for semic...
Publication number
20050036136
Publication date
Feb 17, 2005
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Application
Characterization of ultra shallow junctions in semiconductor wafers
Publication number
20040251927
Publication date
Dec 16, 2004
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Photothermal ultra-shallow junction monitoring system with UV pump
Publication number
20040253751
Publication date
Dec 16, 2004
Alex Salnik
G01 - MEASURING TESTING
Information
Patent Application
Modulated reflectance measurement system using UV probe
Publication number
20040104352
Publication date
Jun 3, 2004
Jon Opsal
G01 - MEASURING TESTING
Information
Patent Application
Modulated reflectance measurement system with multiple wavelengths
Publication number
20030234932
Publication date
Dec 25, 2003
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
Modulated reflectance measurement system with fiber laser technology
Publication number
20030234933
Publication date
Dec 25, 2003
Lena Nicolaides
G01 - MEASURING TESTING
Information
Patent Application
Method and system for combined photothermal modulated reflectance a...
Publication number
20030150993
Publication date
Aug 14, 2003
Lena Nicolaides
G01 - MEASURING TESTING