Alexander Büttner

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Weilburg, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,451,440
- Issue date May 28, 2013
- KLA-Tencor MIE GmbH
- Kurt Hahn
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for the Optical Inspection of Wafers
- Publication number 20100295938
- Publication date Nov 25, 2010
- KLA-TENCOR MIE GMBH
- Kurt Hahn
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION...
- Publication number 20090279080
- Publication date Nov 12, 2009
- Vistec Semiconductor Systems GmbH
- Lambert Danner
- G01 - MEASURING TESTING