Alexander Igorevich Ershov

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,846,887
- Issue date Dec 19, 2023
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Guiding device and associated system
- Patent number 11,822,252
- Issue date Nov 21, 2023
- ASML Netherlands B.V.
- Dzmitry Labetski
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for extending target material delivery system...
- Patent number 11,690,159
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Bob Rollinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of and apparatus for in-situ repair of reflective optic
- Patent number 11,474,440
- Issue date Oct 18, 2022
- ASML Netherlands B.V.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,340,532
- Issue date May 24, 2022
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Guiding device and associated system
- Patent number 10,955,749
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Dzmitry Labetski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of source material delivery in a laser pro...
- Patent number 10,681,795
- Issue date Jun 9, 2020
- ASML Netherlands B.V.
- Alexander Igorevich Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Faceted EUV optical element
- Patent number 10,635,002
- Issue date Apr 28, 2020
- ASML Netherlands B.V.
- David C. Brandt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of active cleaning of EUV optic with RF pl...
- Patent number 10,493,504
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Alexander I. Ershov
- B08 - CLEANING
Information Patent Grant
Method of controlling debris in an EUV light source
- Patent number 10,490,313
- Issue date Nov 26, 2019
- ASML Netherlands B.V.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of source material delivery in a laser pro...
- Patent number 10,237,960
- Issue date Mar 19, 2019
- ASML Netherlands B.V.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Harsh environment optical element protection
- Patent number 10,185,234
- Issue date Jan 22, 2019
- ASML Netherlands B.V.
- Alexander I. Ershov
- G02 - OPTICS
Information Patent Grant
Apparatus for and method of controlling debris in an EUV light source
- Patent number 10,128,017
- Issue date Nov 13, 2018
- ASML Netherlands B.V.
- Alexander I. Ershov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Light collector mirror carrier
- Patent number 9,844,804
- Issue date Dec 19, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of source material delivery in a laser pro...
- Patent number 9,795,023
- Issue date Oct 17, 2017
- ASML Netherlands B.V.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drive laser for EUV light source
- Patent number 9,735,535
- Issue date Aug 15, 2017
- ASML Netherlands B.V.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV LPP source with improved dose control by tracking dose over spe...
- Patent number 9,693,440
- Issue date Jun 27, 2017
- ASML Netherlands B.V.
- Alexander Igorevich Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transport system for an extreme ultraviolet light source
- Patent number 9,560,730
- Issue date Jan 31, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transport system for an extreme ultraviolet light source
- Patent number 9,557,650
- Issue date Jan 31, 2017
- ASML Netherlands B.V.
- Silvia De Dea
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of temperature compensation in high power focusing system fo...
- Patent number 9,541,838
- Issue date Jan 10, 2017
- ASML Netherlands B.V.
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of active cleaning of EUV optic with RF pl...
- Patent number 9,539,622
- Issue date Jan 10, 2017
- ASML Netherlands B.V.
- Alexander I. Ershov
- B08 - CLEANING
Information Patent Grant
Faceted EUV optical element
- Patent number 9,541,840
- Issue date Jan 10, 2017
- ASML Netherlands B.V.
- David C. Brandt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for buffer gas flow stabilization in a laser pr...
- Patent number 9,516,730
- Issue date Dec 6, 2016
- ASML Netherlands B.V.
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of source material delivery in a laser pro...
- Patent number 9,301,382
- Issue date Mar 29, 2016
- ASML Netherlands B.V.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of temperature compensation in high power...
- Patent number 9,280,053
- Issue date Mar 8, 2016
- CYMER, LLC
- Alexander I. Ershov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System, method and apparatus for aligning and synchronizing target...
- Patent number 9,119,278
- Issue date Aug 25, 2015
- ASML Netherlands B.V.
- Christopher C. Chrobak
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light collector mirror cleaning
- Patent number 9,073,098
- Issue date Jul 7, 2015
- ASML Netherlands B.V.
- Silvia De Dea
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for cooling an optic
- Patent number 9,066,412
- Issue date Jun 23, 2015
- ASML Netherlands B.V.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for optics cleaning in an EUV light source
- Patent number 9,000,404
- Issue date Apr 7, 2015
- ASML Netherlands, B.V.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Very high power laser chamber optical improvements
- Patent number 8,982,922
- Issue date Mar 17, 2015
- Cymer, LLC
- Hong Ye
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PRODUCING DROPLETS OF TARGET MATERIAL IN A...
- Publication number 20240292510
- Publication date Aug 29, 2024
- ASML NETHERLANDS B.V.
- Alexander Igorevich Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20240160109
- Publication date May 16, 2024
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20240085796
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ROBUST FLUID COUPLING APPARATUS
- Publication number 20230279974
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Benjamin Andrew Sams
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENE...
- Publication number 20230164900
- Publication date May 25, 2023
- ASML NETHERLANDS B.V.
- Alexander Igorevich Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NOZZLE APPARATUS
- Publication number 20220295625
- Publication date Sep 15, 2022
- ASML NETHERLANDS B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20220291591
- Publication date Sep 15, 2022
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM...
- Publication number 20210392733
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Bob Rollinger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20210141311
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20210109452
- Publication date Apr 15, 2021
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC
- Publication number 20210055665
- Publication date Feb 25, 2021
- ASML NETHERLANDS B.V.
- Alexander I. ERSHOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GUIDING DEVICE AND ASSOCIATED SYSTEM
- Publication number 20200089124
- Publication date Mar 19, 2020
- ASML NETHERLANDS B.V.
- Dzmitry LABETSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...
- Publication number 20190200442
- Publication date Jun 27, 2019
- ASML NETHERLANDS B.V.
- Alexander Igorevich ERSHOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF CONTROLLING DEBRIS IN AN EUV LIGHT SOURCE
- Publication number 20190080811
- Publication date Mar 14, 2019
- ASML NETHERLANDS B.V.
- Alexander I. Ershov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS FOR AND METHOD OF CONTROLLING DEBRIS IN AN EUV LIGHT SOURCE
- Publication number 20180330841
- Publication date Nov 15, 2018
- ASML NETHERLANDS B.V.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...
- Publication number 20180027642
- Publication date Jan 25, 2018
- ASML NETHERLANDS B.V.
- Alexander I Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LPP SOURCE WITH IMPROVED DOSE CONTROL BY TRACKING DOSE OVER SPE...
- Publication number 20170181258
- Publication date Jun 22, 2017
- ASML NETHERLANDS B.V.
- Alexander Igorevich Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PL...
- Publication number 20170095843
- Publication date Apr 6, 2017
- Alexander I. ERSHOV
- B08 - CLEANING
Information Patent Application
FACETED EUV OPTICAL ELEMENT
- Publication number 20170097572
- Publication date Apr 6, 2017
- David C. Brandt
- G02 - OPTICS
Information Patent Application
FACETED EUV OPTICAL ELEMENT
- Publication number 20160179012
- Publication date Jun 23, 2016
- ASML NETHERLANDS B.V.
- David C. BRANDT
- G02 - OPTICS
Information Patent Application
APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...
- Publication number 20160174352
- Publication date Jun 16, 2016
- ASML NETHERLANDS B.V.
- Alexander I. Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER...
- Publication number 20160161855
- Publication date Jun 9, 2016
- ASML NETHERLANDS B.V.
- Alexander I. ERSHOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC
- Publication number 20160091803
- Publication date Mar 31, 2016
- ASML NETHERLANDS B.V.
- Alexander I. ERSHOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20150282287
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Light Collector Mirror Carrier
- Publication number 20150273542
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Silvia De Dea
- B08 - CLEANING
Information Patent Application
APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PL...
- Publication number 20150266067
- Publication date Sep 24, 2015
- CYMER, LLC
- Alexander I. ERSHOV
- B08 - CLEANING
Information Patent Application
APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...
- Publication number 20150156855
- Publication date Jun 4, 2015
- Cymer LLC
- Alexander I. ERSHOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20150069273
- Publication date Mar 12, 2015
- CYMER, LLC
- Silvia De Dea
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER...
- Publication number 20150062544
- Publication date Mar 5, 2015
- Cymer LLC
- Alexander I. ERSHOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE
- Publication number 20140110609
- Publication date Apr 24, 2014
- CYMER, LLC
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Alexander Igorevich Ershov

Person

Patents Grantslast 30 patents

Prolonging optical element lifetime in an EUV lithography system

Guiding device and associated system

Apparatus and method for extending target material delivery system...

Method of and apparatus for in-situ repair of reflective optic

Prolonging optical element lifetime in an EUV lithography system

Guiding device and associated system

Apparatus for and method of source material delivery in a laser pro...

Faceted EUV optical element

Apparatus for and method of active cleaning of EUV optic with RF pl...

Method of controlling debris in an EUV light source

Apparatus for and method of source material delivery in a laser pro...

Harsh environment optical element protection

Apparatus for and method of controlling debris in an EUV light source

Light collector mirror carrier

Apparatus for and method of source material delivery in a laser pro...

Drive laser for EUV light source

EUV LPP source with improved dose control by tracking dose over spe...

Transport system for an extreme ultraviolet light source

Transport system for an extreme ultraviolet light source

Method of temperature compensation in high power focusing system fo...

Apparatus for and method of active cleaning of EUV optic with RF pl...

Faceted EUV optical element

Systems and methods for buffer gas flow stabilization in a laser pr...

Apparatus for and method of source material delivery in a laser pro...

Apparatus for and method of temperature compensation in high power...

System, method and apparatus for aligning and synchronizing target...

Light collector mirror cleaning

Systems and methods for cooling an optic

Systems and methods for optics cleaning in an EUV light source

Very high power laser chamber optical improvements

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR PRODUCING DROPLETS OF TARGET MATERIAL IN A...

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

GUIDING DEVICE AND ASSOCIATED SYSTEM

ROBUST FLUID COUPLING APPARATUS

APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENE...

NOZZLE APPARATUS

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

APPARATUS AND METHOD FOR EXTENDING TARGET MATERIAL DELIVERY SYSTEM...

GUIDING DEVICE AND ASSOCIATED SYSTEM

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC

GUIDING DEVICE AND ASSOCIATED SYSTEM

APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...

METHOD OF CONTROLLING DEBRIS IN AN EUV LIGHT SOURCE

APPARATUS FOR AND METHOD OF CONTROLLING DEBRIS IN AN EUV LIGHT SOURCE

APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...

EUV LPP SOURCE WITH IMPROVED DOSE CONTROL BY TRACKING DOSE OVER SPE...

APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PL...

FACETED EUV OPTICAL ELEMENT

FACETED EUV OPTICAL ELEMENT

APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...

APPARATUS FOR AND METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER...

METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

Light Collector Mirror Carrier

APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PL...

APPARATUS FOR AND METHOD OF SOURCE MATERIAL DELIVERY IN A LASER PRO...

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

APPARATUS FOR AND METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER...

SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE