Alexander Tam

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chamber apparatus for chemical etching of dielectric materials
- Patent number 11,302,520
- Issue date Apr 12, 2022
- Applied Materials, Inc.
- Tien Fak Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-plate faceplate for a processing chamber
- Patent number 10,811,232
- Issue date Oct 20, 2020
- Applied Materials, Inc.
- Deepak Doddabelavangala Srikantaiah
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Showerhead assembly with gas injection distribution devices
- Patent number 10,130,958
- Issue date Nov 20, 2018
- Applied Materials, Inc.
- Alexander Tam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal with multi-zone temperature control and multiple purge cap...
- Patent number 10,062,587
- Issue date Aug 28, 2018
- Applied Materials, Inc.
- Xinglong Chen
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Multi-zone resistive heater
- Patent number 9,892,941
- Issue date Feb 13, 2018
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-gas straight channel showerhead
- Patent number 9,644,267
- Issue date May 9, 2017
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal with multi-zone temperature control and multiple purge cap...
- Patent number 9,267,739
- Issue date Feb 23, 2016
- Applied Materials, Inc.
- Xinglong Chen
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Method and apparatus for inducing turbulent flow of a processing ch...
- Patent number 8,910,644
- Issue date Dec 16, 2014
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple precursor showerhead with by-pass ports
- Patent number 8,679,956
- Issue date Mar 25, 2014
- Applied Materials, Inc.
- Alexander Tam
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Multi-gas straight channel showerhead
- Patent number 8,481,118
- Issue date Jul 9, 2013
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple precursor showerhead with by-pass ports
- Patent number 8,361,892
- Issue date Jan 29, 2013
- Applied Materials, Inc.
- Alexander Tam
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Cleaning plate for inducing turbulent flow of a processing chamber...
- Patent number D664170
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Hua Chung
- D15 - Machines not elsewhere specified
Information Patent Grant
Lid assembly for a substrate processing chamber
- Patent number D642605
- Issue date Aug 2, 2011
- Applied Materials, Inc.
- Tetsuya Ishikawa
- D15 - Machines not elsewhere specified
Information Patent Grant
Multi-gas straight channel showerhead
- Patent number 7,976,631
- Issue date Jul 12, 2011
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for depositing a gaseous mixture onto a substrate...
- Patent number 7,674,352
- Issue date Mar 9, 2010
- Applied Materials, Inc.
- David Bour
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Emissivity-change-free pumping plate kit in a single wafer chamber
- Patent number 6,582,522
- Issue date Jun 24, 2003
- Applied Materials, Inc.
- Lee Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR CHAMBER COATINGS AND PROCESSES
- Publication number 20190304756
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PLATE FACEPLATE FOR A PROCESSING CHAMBER
- Publication number 20190051499
- Publication date Feb 14, 2019
- Applied Materials, Inc.
- Deepak Doddabelavangala SRIKANTAIAH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PEDESTAL WITH MULTI-ZONE TEMPERATURE CONTROL AND MULTIPLE PURGE CAP...
- Publication number 20160126118
- Publication date May 5, 2016
- Applied Materials, Inc.
- Xinglong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER APPARATUS FOR CHEMICAL ETCHING OF DIELECTRIC MATERIALS
- Publication number 20150380220
- Publication date Dec 31, 2015
- Applied Materials, Inc.
- Tien Fak TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL WITH MULTI-ZONE TEMPERATURE CONTROL AND MULTIPLE PURGE CAP...
- Publication number 20140021673
- Publication date Jan 23, 2014
- Applied Materials, Inc.
- Xinglong Chen
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD
- Publication number 20140014745
- Publication date Jan 16, 2014
- Applied Materials, Inc.
- Brian H. BURROWS
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTIPLE PRECURSOR SHOWERHEAD WITH BY-PASS PORTS
- Publication number 20130298835
- Publication date Nov 14, 2013
- Alexander TAM
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
- Publication number 20120291709
- Publication date Nov 22, 2012
- Applied Materials, Inc.
- Jacob Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD
- Publication number 20120024388
- Publication date Feb 2, 2012
- Brian H. Burrows
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CH...
- Publication number 20110308551
- Publication date Dec 22, 2011
- Applied Materials, Inc.
- Hua Chung
- B08 - CLEANING
Information Patent Application
MULTIPLE PRECURSOR SHOWERHEAD WITH BY-PASS PORTS
- Publication number 20110256645
- Publication date Oct 20, 2011
- Applied Materials, Inc.
- Alexander Tam
- C30 - CRYSTAL GROWTH
Information Patent Application
SHOWERHEAD ASSEMBLY WITH GAS INJECTION DISTRIBUTION DEVICES
- Publication number 20110256315
- Publication date Oct 20, 2011
- Applied Materials, Inc.
- Alexander Tam
- C30 - CRYSTAL GROWTH
Information Patent Application
SHOWERHEAD ASSEMBLY WITH METROLOGY PORT PURGE
- Publication number 20110253044
- Publication date Oct 20, 2011
- Applied Materials, Inc.
- Alexander Tam
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTIPLE PRECURSOR CONCENTRIC DELIVERY SHOWERHEAD
- Publication number 20110256692
- Publication date Oct 20, 2011
- Applied Materials, Inc.
- Alexander Tam
- C30 - CRYSTAL GROWTH
Information Patent Application
CVD APPARATUS
- Publication number 20110121503
- Publication date May 26, 2011
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATING SUBSTRATE SUPPORT AND METHODS OF USE
- Publication number 20100224130
- Publication date Sep 9, 2010
- Jacob Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HVPE SHOWERHEAD DESIGN
- Publication number 20100215854
- Publication date Aug 26, 2010
- Brian H. Burrows
- C30 - CRYSTAL GROWTH
Information Patent Application
Multi-Zone Resistive Heater
- Publication number 20090314762
- Publication date Dec 24, 2009
- Applied Materials, Inc.
- Anqing Cui
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING SYSTEM FOR FABRICATING COMPOUND NITRIDE SEMICONDUCTOR DE...
- Publication number 20090194026
- Publication date Aug 6, 2009
- BRIAN H. BURROWS
- C30 - CRYSTAL GROWTH
Information Patent Application
CVD APPARATUS
- Publication number 20090194024
- Publication date Aug 6, 2009
- APPLIED MATERIALS, INC.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-GAS CONCENTRIC INJECTION SHOWERHEAD
- Publication number 20090095221
- Publication date Apr 16, 2009
- Alexander TAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-GAS SPIRAL CHANNEL SHOWERHEAD
- Publication number 20090095222
- Publication date Apr 16, 2009
- Alexander Tam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD
- Publication number 20090098276
- Publication date Apr 16, 2009
- APPLIED MATERIALS, INC.
- Brian H. BURROWS
- C30 - CRYSTAL GROWTH
Information Patent Application
HVPE SHOWERHEAD DESIGN
- Publication number 20080314311
- Publication date Dec 25, 2008
- Brian H. Burrows
- C30 - CRYSTAL GROWTH
Information Patent Application
SYSTEM AND METHOD FOR DEPOSITING A GASEOUS MIXTURE ONTO A SUBSTRATE...
- Publication number 20080124463
- Publication date May 29, 2008
- Applied Materials, Inc.
- David Bour
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-zone resistive heater
- Publication number 20070125762
- Publication date Jun 7, 2007
- APPLIED MATERIALS, INC.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reaction chamber with opposing pockets for gas injection and exhaust
- Publication number 20070084406
- Publication date Apr 19, 2007
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING CHAMBER WITH DIFFUSER PLATE AND INJECTOR ASSEMBLY
- Publication number 20070084408
- Publication date Apr 19, 2007
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for the low temperature deposition of doped si...
- Publication number 20070082507
- Publication date Apr 12, 2007
- APPLIED MATERIALS, INC.
- R. Suryanarayanan Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating substrate support and methods of use
- Publication number 20060281310
- Publication date Dec 14, 2006
- APPLIED MATERIALS, INC.
- Jacob Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Alexander Tam

Person

Patents Grantslast 30 patents

Chamber apparatus for chemical etching of dielectric materials

Multi-plate faceplate for a processing chamber

Showerhead assembly with gas injection distribution devices

Pedestal with multi-zone temperature control and multiple purge cap...

Multi-zone resistive heater

Multi-gas straight channel showerhead

Pedestal with multi-zone temperature control and multiple purge cap...

Method and apparatus for inducing turbulent flow of a processing ch...

Multiple precursor showerhead with by-pass ports

Multi-gas straight channel showerhead

Multiple precursor showerhead with by-pass ports

Cleaning plate for inducing turbulent flow of a processing chamber...

Lid assembly for a substrate processing chamber

Multi-gas straight channel showerhead

System and method for depositing a gaseous mixture onto a substrate...

Emissivity-change-free pumping plate kit in a single wafer chamber

Patents Applicationslast 30 patents

SEMICONDUCTOR CHAMBER COATINGS AND PROCESSES

MULTI-PLATE FACEPLATE FOR A PROCESSING CHAMBER

PEDESTAL WITH MULTI-ZONE TEMPERATURE CONTROL AND MULTIPLE PURGE CAP...

CHAMBER APPARATUS FOR CHEMICAL ETCHING OF DIELECTRIC MATERIALS

PEDESTAL WITH MULTI-ZONE TEMPERATURE CONTROL AND MULTIPLE PURGE CAP...

MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD

MULTIPLE PRECURSOR SHOWERHEAD WITH BY-PASS PORTS

ROTATING SUBSTRATE SUPPORT AND METHODS OF USE

MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD

METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CH...

MULTIPLE PRECURSOR SHOWERHEAD WITH BY-PASS PORTS

SHOWERHEAD ASSEMBLY WITH GAS INJECTION DISTRIBUTION DEVICES

SHOWERHEAD ASSEMBLY WITH METROLOGY PORT PURGE

MULTIPLE PRECURSOR CONCENTRIC DELIVERY SHOWERHEAD

CVD APPARATUS

ROTATING SUBSTRATE SUPPORT AND METHODS OF USE

HVPE SHOWERHEAD DESIGN

Multi-Zone Resistive Heater

PROCESSING SYSTEM FOR FABRICATING COMPOUND NITRIDE SEMICONDUCTOR DE...

CVD APPARATUS

MULTI-GAS CONCENTRIC INJECTION SHOWERHEAD

MULTI-GAS SPIRAL CHANNEL SHOWERHEAD

MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD

HVPE SHOWERHEAD DESIGN

SYSTEM AND METHOD FOR DEPOSITING A GASEOUS MIXTURE ONTO A SUBSTRATE...

Multi-zone resistive heater

Reaction chamber with opposing pockets for gas injection and exhaust

BATCH PROCESSING CHAMBER WITH DIFFUSER PLATE AND INJECTOR ASSEMBLY

Method and apparatus for the low temperature deposition of doped si...

Rotating substrate support and methods of use