Alexander Vogler

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Measuring assembly for the frequency-based determination of the pos...
- Patent number 11,274,914
- Issue date Mar 15, 2022
- Carl Zeiss SMT GmbH
- Matthias Manger
- G01 - MEASURING TESTING
Information Patent Grant
Assembly in a microlithographic projection exposure apparatus
- Patent number 10,571,816
- Issue date Feb 25, 2020
- Carl Zeiss SMT GmbH
- Jasper Wesselingh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for actuating at least one optical element in an optica...
- Patent number 10,303,065
- Issue date May 28, 2019
- Carl Zeiss SMT GmbH
- Markus Hauf
- G02 - OPTICS
Information Patent Grant
Lithography device with eddy-current brake
- Patent number 9,887,613
- Issue date Feb 6, 2018
- Carl Zeiss SMT GmbH
- Alexander Vogler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for actuating at least one optical element in an optica...
- Patent number 9,665,011
- Issue date May 30, 2017
- Carl Zeiss SMT GmbH
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Damping device
- Patent number 9,513,452
- Issue date Dec 6, 2016
- Carl Zeiss SMT GmbH
- Alexander Vogler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL DEVICE, METHOD FOR ADJUSTING A SETPOINT DEFORMATION AND LIT...
- Publication number 20240085783
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Markus Raab
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE...
- Publication number 20230228798
- Publication date Jul 20, 2023
- Carl Zeiss SMT GMBH
- Markus Raab
- G01 - MEASURING TESTING
Information Patent Application
ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
- Publication number 20230229092
- Publication date Jul 20, 2023
- Carl Zeiss SMT GMBH
- Matthias Manger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POS...
- Publication number 20210080244
- Publication date Mar 18, 2021
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G01 - MEASURING TESTING
Information Patent Application
ASSEMBLY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20190361362
- Publication date Nov 28, 2019
- Carl Zeiss SMT GMBH
- Jasper Wesselingh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...
- Publication number 20170261859
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...
- Publication number 20150198892
- Publication date Jul 16, 2015
- Carl Zeiss SMT GMBH
- Markus Hauf
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE
- Publication number 20140346909
- Publication date Nov 27, 2014
- Alexander Vogler
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
DAMPING DEVICE
- Publication number 20120138401
- Publication date Jun 7, 2012
- Carl Zeiss SMT GMBH
- Alexander Vogler
- G02 - OPTICS

Alexander Vogler

Person

Patents Grantslast 30 patents

Measuring assembly for the frequency-based determination of the pos...

Assembly in a microlithographic projection exposure apparatus

Arrangement for actuating at least one optical element in an optica...

Lithography device with eddy-current brake

Arrangement for actuating at least one optical element in an optica...

Damping device

Patents Applicationslast 30 patents

OPTICAL DEVICE, METHOD FOR ADJUSTING A SETPOINT DEFORMATION AND LIT...

METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE...

ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY

MEASURING ASSEMBLY FOR THE FREQUENCY-BASED DETERMINATION OF THE POS...

ASSEMBLY IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...

ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICA...

LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE

DAMPING DEVICE