Alexandre Kemp

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Ludwigshafen am Rhein, DE

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Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus for semiconductor lithography with in...
- Patent number 10,466,598
- Issue date Nov 5, 2019
- Carl Zeiss SMT GmbH
- Alireza Akbarinia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR CONTROLLING THE TEMPERATURE OF ELEMENTS IN MI...
- Publication number 20230082054
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Thomas Monz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH IN...
- Publication number 20190219934
- Publication date Jul 18, 2019
- Carl Zeiss SMT GMBH
- Alireza Akbarinia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY