Alfred Kersch

Person

Putzbrunn, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing an annular microstructure element
- Patent number 7,316,933
- Issue date Jan 8, 2008
- Infineon Technologies AG
- Alfred Kersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PVD method and PVD apparatus
- Patent number 7,022,209
- Issue date Apr 4, 2006
- Infineon Technologies AG
- Winfried Sabisch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor memory with memory cells comprising a vertical select...
- Patent number 6,977,405
- Issue date Dec 20, 2005
- Infineon Technologies, AG
- Jörn Lützen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction chamber for processing a substrate wafer, and method for p...
- Patent number 6,716,748
- Issue date Apr 6, 2004
- Infineon Technologies AG
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for chemical mechanical polishing
- Patent number 6,660,637
- Issue date Dec 9, 2003
- Infineon Technologies AG
- Stephanie Delage
- B24 - GRINDING POLISHING
Information Patent Grant
Method for determining the relevant ion and particle flows in i-PVD...
- Patent number 6,649,521
- Issue date Nov 18, 2003
- Infineon Technologies AG
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and installation for fabricating one-sided buried straps
- Patent number 6,579,758
- Issue date Jun 17, 2003
- Infineon Technologies AG
- Bernd Göbel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Configuration for the execution of a plasma based sputter process
- Patent number 6,524,448
- Issue date Feb 25, 2003
- Infineon Technologies AG
- Ralf-Peter Brinkmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating a micro-technical structure, and micro-techni...
- Patent number 6,458,603
- Issue date Oct 1, 2002
- Infineon Technologies AG
- Alfred Kersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a microtechnical structure
- Patent number 6,413,886
- Issue date Jul 2, 2002
- Infineon Technologies AG
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of Performing Proximity Correction
- Publication number 20090204936
- Publication date Aug 13, 2009
- Werner Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Manufacturing a Structure, Semiconductor Device and Stru...
- Publication number 20090102023
- Publication date Apr 23, 2009
- Stephan Wege
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and system for determining deformations on a substrate
- Publication number 20080182344
- Publication date Jul 31, 2008
- Steffen Mueller
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR FORMING A DIELECTRIC LAYER
- Publication number 20080176375
- Publication date Jul 24, 2008
- Qimonda AG
- Elke Erben
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Fabricating a Structure for a Semiconductor Component, a...
- Publication number 20080085606
- Publication date Apr 10, 2008
- Dominik Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS AND STARTING MATERIAL FOR PROVIDING A GASEOUS PRE...
- Publication number 20070269598
- Publication date Nov 22, 2007
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Automatic layer deposition process
- Publication number 20070161180
- Publication date Jul 12, 2007
- Infineon Technologies AG
- Elke Erben
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing an annular microstructure element
- Publication number 20050250344
- Publication date Nov 10, 2005
- Alfred Kersch
- B82 - NANO-TECHNOLOGY
Information Patent Application
Compensation frame for receiving a substrate
- Publication number 20050016468
- Publication date Jan 27, 2005
- Guenther Ruhl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor memory with memory cells comprising a vertical select...
- Publication number 20040201055
- Publication date Oct 14, 2004
- Jorn Lutzen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD method and PVD apparatus
- Publication number 20040011640
- Publication date Jan 22, 2004
- Winfried Sabisch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for chemical mechanical polishing
- Publication number 20030064594
- Publication date Apr 3, 2003
- Stephanie Delage
- B24 - GRINDING POLISHING
Information Patent Application
Method for determining the relevant ion and particle flows in I-PVD...
- Publication number 20030029727
- Publication date Feb 13, 2003
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for producing at least one depression in a sem...
- Publication number 20030019837
- Publication date Jan 30, 2003
- Alfred Kersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and installation for fabricating one-sided buried straps
- Publication number 20030003652
- Publication date Jan 2, 2003
- Bernd Gobel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reaction chamber for processing a substrate wafer, and method for o...
- Publication number 20020092840
- Publication date Jul 18, 2002
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of fabricating a micro-technical structure, and micro-techni...
- Publication number 20020042158
- Publication date Apr 11, 2002
- Alfred Kersch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Configuration for the execution of a plasma based sputter process
- Publication number 20020036132
- Publication date Mar 28, 2002
- Ralf-Peter Brinkmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of producing a ferroelectric solid-state layer using an auxi...
- Publication number 20020025377
- Publication date Feb 28, 2002
- Alfred Kersch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Alfred Kersch

Person

Patents Grantslast 30 patents

Method for producing an annular microstructure element

PVD method and PVD apparatus

Semiconductor memory with memory cells comprising a vertical select...

Reaction chamber for processing a substrate wafer, and method for p...

Process for chemical mechanical polishing

Method for determining the relevant ion and particle flows in i-PVD...

Method and installation for fabricating one-sided buried straps

Configuration for the execution of a plasma based sputter process

Method of fabricating a micro-technical structure, and micro-techni...

Method for fabricating a microtechnical structure

Patents Applicationslast 30 patents

Method of Performing Proximity Correction

Method for Manufacturing a Structure, Semiconductor Device and Stru...

Method and system for determining deformations on a substrate

METHOD FOR FORMING A DIELECTRIC LAYER

Method for Fabricating a Structure for a Semiconductor Component, a...

METHOD, APPARATUS AND STARTING MATERIAL FOR PROVIDING A GASEOUS PRE...

Automatic layer deposition process

Method for producing an annular microstructure element

Compensation frame for receiving a substrate

Semiconductor memory with memory cells comprising a vertical select...

PVD method and PVD apparatus

Process for chemical mechanical polishing

Method for determining the relevant ion and particle flows in I-PVD...

Method and apparatus for producing at least one depression in a sem...

Method and installation for fabricating one-sided buried straps

Reaction chamber for processing a substrate wafer, and method for o...

Method of fabricating a micro-technical structure, and micro-techni...

Configuration for the execution of a plasma based sputter process

Method of producing a ferroelectric solid-state layer using an auxi...