Alfred Wagner

Person

Brewster, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Protection of photomasks from 193nm radiation damage using thin coa...
- Patent number 11,143,953
- Issue date Oct 12, 2021
- International Business Machines Corporation
- Robert L. Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser surgical apparatus and methods of its use minimizing damage d...
- Patent number 10,058,388
- Issue date Aug 28, 2018
- GLOBALFOUNDRIES Inc.
- Richard Alan Haight
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Debris minimization and improved spatial resolution in pulsed laser...
- Patent number 9,102,008
- Issue date Aug 11, 2015
- International Business Machine Corporation
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks
- Patent number 9,052,617
- Issue date Jun 9, 2015
- International Business Machines Corporation
- Emily E. Gallagher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks
- Patent number 8,748,063
- Issue date Jun 10, 2014
- International Business Machines Corporation
- Emily E. Gallagher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mitigation of mask defects by pattern shifting
- Patent number 8,726,202
- Issue date May 13, 2014
- International Business Machines Corporation
- Alfred Wagner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Techniques for reducing degradation and/or modifying feature size o...
- Patent number 8,568,959
- Issue date Oct 29, 2013
- International Business Machines Corporation
- Peter H. Bartlau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mitigation of mask defects by pattern shifting
- Patent number 8,458,623
- Issue date Jun 4, 2013
- International Business Machines Corporation
- Alfred Wagner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Evaluation of image processing algorithms
- Patent number 8,442,299
- Issue date May 14, 2013
- International Business Machines Corporation
- Peter P. Longo
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method for minimizing sample damage during the ablation of a first...
- Patent number 8,389,890
- Issue date Mar 5, 2013
- International Business Machines Corporation
- Richard Alan Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Enhanced quality of laser ablation by controlling laser repetition...
- Patent number 8,344,286
- Issue date Jan 1, 2013
- International Business Machines Corporation
- Peter P. Longo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Debris minimization and improved spatial resolution in pulsed laser...
- Patent number 7,994,450
- Issue date Aug 9, 2011
- International Business Machines Corporation
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for repair of reflective photomasks
- Patent number 7,759,606
- Issue date Jul 20, 2010
- International Business Machines Corporation
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for eliminating the structure and edge roughness...
- Patent number 7,732,104
- Issue date Jun 8, 2010
- International Business Machines Corporation
- Alfred Wagner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for minimizing sample damage during the ablation of material...
- Patent number 7,649,153
- Issue date Jan 19, 2010
- International Business Machines Corporation
- Richard Alan Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for performing laser CVD
- Patent number 7,211,300
- Issue date May 1, 2007
- International Business Machines Corporation
- Richard A. Haight
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for repair of reflective photomasks
- Patent number 7,170,030
- Issue date Jan 30, 2007
- International Business Machines Corporation
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for performing laser CVD
- Patent number 6,656,539
- Issue date Dec 2, 2003
- International Business Machines Corporation
- Richard A. Haight
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for modifying enclosed areas for ion beam and las...
- Patent number 6,591,154
- Issue date Jul 8, 2003
- International Business Machines Corporation
- Richard A. Haight
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for minimizing sample damage during the ablation of material...
- Patent number 6,333,485
- Issue date Dec 25, 2001
- International Business Machines Corporation
- Richard Alan Haight
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Methods for repair of photomasks
- Patent number 6,190,836
- Issue date Feb 20, 2001
- International Business Machines Corporation
- Brian J. Grenon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for repair of photomasks
- Patent number 6,165,649
- Issue date Dec 26, 2000
- International Business Machines Corporation
- Brian J. Grenon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for repair of photomasks
- Patent number 6,156,461
- Issue date Dec 5, 2000
- International Business Machines Corporation
- Brian J. Grenon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for repair of photomasks
- Patent number 6,090,507
- Issue date Jul 18, 2000
- International Business Machines Corporation
- Brian J. Grenon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Focused ion beam metrology
- Patent number 5,798,529
- Issue date Aug 25, 1998
- International Business Machines Corporation
- Alfred Wagner
- G01 - MEASURING TESTING
Information Patent Grant
Grid structure for reducing current density in focussed ion beam
- Patent number 5,159,170
- Issue date Oct 27, 1992
- International Business Machines Corporation
- James P. Levin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas delivery for ion beam deposition and etching
- Patent number 5,149,974
- Issue date Sep 22, 1992
- International Business Machines Corporation
- Steven J. Kirch
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROTECTION OF PHOTOMASKS FROM 193nm RADIATION DAMAGE USING THIN COA...
- Publication number 20200301270
- Publication date Sep 24, 2020
- International Business Machines Corporation
- Robert L. Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laser Surgical Apparatus and Methods of its Use Minimizing Damage D...
- Publication number 20150265351
- Publication date Sep 24, 2015
- International Business Machines Corporation
- Richard Alan Haight
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
EXTREME ULTRAVIOLET (EUV) MULTILAYER DEFECT COMPENSATION AND EUV MASKS
- Publication number 20140272687
- Publication date Sep 18, 2014
- International Business Machines Corporation
- Emily E. GALLAGHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET (EUV) MULTILAYER DEFECT COMPENSATION AND EUV MASKS
- Publication number 20140038087
- Publication date Feb 6, 2014
- International Business Machines Corporation
- Emily E. GALLAGHER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MITIGATION OF MASK DEFECTS BY PATTERN SHIFTING
- Publication number 20130273463
- Publication date Oct 17, 2013
- International Business Machines Corporation
- Alfred Wagner
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus for Minimizing Sample Damage During the Ablation of Biolo...
- Publication number 20130211388
- Publication date Aug 15, 2013
- International Business Machines Corporation
- Richard Alan Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Evaluation of Image Processing Algorithms
- Publication number 20110110578
- Publication date May 12, 2011
- International Business Machines Corporation
- Peter P. Longo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ENHANCED QUALITY OF LASER ABLATION BY CONTROLLING LASER REPETITION...
- Publication number 20100289186
- Publication date Nov 18, 2010
- International Business Machines Corporation
- Peter P. Longo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR ELIMINATING THE STRUCTURE AND EDGE ROUGHNESS...
- Publication number 20100219168
- Publication date Sep 2, 2010
- International Business Machines Corporation
- Alfred Wagner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TECHNIQUES FOR REDUCING DEGRADATION AND/OR MODIFYING FEATURE SIZE O...
- Publication number 20100086876
- Publication date Apr 8, 2010
- International Business Machines Corporation
- Peter H. Bartlau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MINIMIZING SAMPLE DAMAGE DURING THE ABLATION OF MATERIAL...
- Publication number 20100006550
- Publication date Jan 14, 2010
- Richard Alan Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DEBRIS MINIMIZATION AND IMPROVED SPATIAL RESOLUTION IN PULSED LASER...
- Publication number 20090107964
- Publication date Apr 30, 2009
- International Business Machines Corporation
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR ELIMINATING THE STRUCTURE AND EDGE ROUGHNESS...
- Publication number 20080176147
- Publication date Jul 24, 2008
- International Business Machines Corporation
- Alfred Wagner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR REPAIR OF REFLECTIVE PHOTOMASKS
- Publication number 20060243712
- Publication date Nov 2, 2006
- International Business Machines Corporation
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for repair of reflective photomasks
- Publication number 20050056625
- Publication date Mar 17, 2005
- International Business Machines
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for performing laser CVD
- Publication number 20040091638
- Publication date May 13, 2004
- International Business Machines Corporation
- Richard A. Haight
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Debris minimization and improved spatial resolution in pulsed laser...
- Publication number 20030127441
- Publication date Jul 10, 2003
- Richard A. Haight
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR MODIFYING ENCLOSED AREAS FOR ION BEAM AND LAS...
- Publication number 20030105547
- Publication date Jun 5, 2003
- Richard A. Haight
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for minimizing sample damage during the ablation of material...
- Publication number 20020125230
- Publication date Sep 12, 2002
- International Business Machines Corporation
- Richard Alan Haight
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Alfred Wagner

Person

Patents Grantslast 30 patents

Protection of photomasks from 193nm radiation damage using thin coa...

Laser surgical apparatus and methods of its use minimizing damage d...

Debris minimization and improved spatial resolution in pulsed laser...

Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks

Extreme ultraviolet (EUV) multilayer defect compensation and EUV masks

Mitigation of mask defects by pattern shifting

Techniques for reducing degradation and/or modifying feature size o...

Mitigation of mask defects by pattern shifting

Evaluation of image processing algorithms

Method for minimizing sample damage during the ablation of a first...

Enhanced quality of laser ablation by controlling laser repetition...

Debris minimization and improved spatial resolution in pulsed laser...

Method and apparatus for repair of reflective photomasks

System and method for eliminating the structure and edge roughness...

Method for minimizing sample damage during the ablation of material...

Method and apparatus for performing laser CVD

Method and apparatus for repair of reflective photomasks

Method and apparatus for performing laser CVD

System and method for modifying enclosed areas for ion beam and las...

Method for minimizing sample damage during the ablation of material...

Methods for repair of photomasks

Methods for repair of photomasks

Method for repair of photomasks

Methods for repair of photomasks

Focused ion beam metrology

Grid structure for reducing current density in focussed ion beam

Gas delivery for ion beam deposition and etching

Patents Applicationslast 30 patents

PROTECTION OF PHOTOMASKS FROM 193nm RADIATION DAMAGE USING THIN COA...

Laser Surgical Apparatus and Methods of its Use Minimizing Damage D...

EXTREME ULTRAVIOLET (EUV) MULTILAYER DEFECT COMPENSATION AND EUV MASKS

EXTREME ULTRAVIOLET (EUV) MULTILAYER DEFECT COMPENSATION AND EUV MASKS

MITIGATION OF MASK DEFECTS BY PATTERN SHIFTING

Apparatus for Minimizing Sample Damage During the Ablation of Biolo...

Evaluation of Image Processing Algorithms

ENHANCED QUALITY OF LASER ABLATION BY CONTROLLING LASER REPETITION...

SYSTEM AND METHOD FOR ELIMINATING THE STRUCTURE AND EDGE ROUGHNESS...

TECHNIQUES FOR REDUCING DEGRADATION AND/OR MODIFYING FEATURE SIZE O...

METHOD FOR MINIMIZING SAMPLE DAMAGE DURING THE ABLATION OF MATERIAL...

DEBRIS MINIMIZATION AND IMPROVED SPATIAL RESOLUTION IN PULSED LASER...

SYSTEM AND METHOD FOR ELIMINATING THE STRUCTURE AND EDGE ROUGHNESS...

METHOD AND APPARATUS FOR REPAIR OF REFLECTIVE PHOTOMASKS

Method and apparatus for repair of reflective photomasks

Method and apparatus for performing laser CVD

Debris minimization and improved spatial resolution in pulsed laser...

SYSTEM AND METHOD FOR MODIFYING ENCLOSED AREAS FOR ION BEAM AND LAS...

Method for minimizing sample damage during the ablation of material...