Number | Name | Date | Kind |
---|---|---|---|
4548883 | Wagner | Oct 1985 | |
4733074 | Kato et al. | Mar 1988 | |
4851097 | Hattori et al. | Jul 1989 | |
4910398 | Komatsu et al. | Mar 1990 | |
4924104 | Stengl et al. | May 1990 | |
5028780 | Kaito et al. | Jul 1991 | |
5029250 | Komatsu et al. | Jul 1991 | |
5093572 | Hosono | Mar 1992 | |
5113072 | Yamaguchi et al. | May 1992 | |
5159170 | Levin et al. | Oct 1992 | |
5429730 | Nakamura et al. | Jul 1995 | |
5495110 | Ohnishi et al. | Feb 1996 | |
5504340 | Mizumura et al. | Apr 1996 | |
5569392 | Miyoshi et al. | Oct 1996 |
Number | Date | Country |
---|---|---|
WO 9632741 | Oct 1996 | WOX |
Entry |
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Stark, T., et al., "H2O Enhanced Focused Ion Beam Micromachining," J. Vac. Sci. Technol. B, 13(6): pp. 2565-2569 (1995), no month. |
Wagner, A., et al., "Focused Ion Beam Metrology," J. Vac. Sci. Technol. B, 13(6): pp. 2629-2636 (1995), no month. |
Application Note 6.0 rev. a of FEI Co., entitled "Properties of Selective Carbon Mill (H2O-based FIB Process)", (1996), no month. |