Alton Phillips

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vibration reduction system for precision robotics applications
- Patent number 12,151,378
- Issue date Nov 26, 2024
- Nikon Corporation
- Michael Birk Binnard
- G05 - CONTROLLING REGULATING
Information Patent Grant
Balanced active stabilizers
- Patent number 12,066,677
- Issue date Aug 20, 2024
- Nikon Corporation
- Yoon Jung Jeong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vibration isolation systems with reaction masses and actuators
- Patent number 12,055,193
- Issue date Aug 6, 2024
- Nikon Corporation
- Alton Hugh Phillips
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Lithography tool having a reticle stage capable of dynamic reticle...
- Patent number 10,289,007
- Issue date May 14, 2019
- Nikon Corporation
- Alton Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer bonding system and method
- Patent number 10,121,760
- Issue date Nov 6, 2018
- Nikon Corporation
- Alton H. Phillips
- B32 - LAYERED PRODUCTS
Information Patent Grant
Fly's eye optical mirror with a plurality of optical elements rotat...
- Patent number 10,114,193
- Issue date Oct 30, 2018
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for clamping wafers together in alignment using p...
- Patent number 9,947,637
- Issue date Apr 17, 2018
- Nikon Corporation
- Alton H. Phillips
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mirror assembly for an exposure apparatus
- Patent number 9,323,157
- Issue date Apr 26, 2016
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
Exposure method and device manufacturing method including selective...
- Patent number 9,304,385
- Issue date Apr 5, 2016
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High heat load optics with a liquid metal interface for use in an e...
- Patent number 9,041,900
- Issue date May 26, 2015
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
High heat load optics with a liquid metal interface for use in an e...
- Patent number 9,041,904
- Issue date May 26, 2015
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
Thermally conductive coil and methods and systems
- Patent number 8,847,721
- Issue date Sep 30, 2014
- Nikon Corporation
- Alexander Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for utilizing in-situ measurements techniques...
- Patent number 8,794,011
- Issue date Aug 5, 2014
- Nikon Corporation
- Alton H. Phillips
- G01 - MEASURING TESTING
Information Patent Grant
Temperature-controlled holding devices for planar articles
- Patent number 8,767,174
- Issue date Jul 1, 2014
- Nikon Corporation
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for aligning mirror blocks of a multi-element...
- Patent number 8,739,383
- Issue date Jun 3, 2014
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
Utilities transfer system in a lithography system
- Patent number 8,619,234
- Issue date Dec 31, 2013
- Nikon Corporation
- Alton Hugh Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Self-correcting optical elements for high-thermal-load optical systems
- Patent number 8,425,060
- Issue date Apr 23, 2013
- Nikon Corporation
- Douglas C. Watson
- G02 - OPTICS
Information Patent Grant
Devices and methods for reducing residual reticle chucking forces
- Patent number 8,284,379
- Issue date Oct 9, 2012
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hydrostatic liquid-metal deformable optical elements
- Patent number 8,002,420
- Issue date Aug 23, 2011
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
EUV reticle handling system and method
- Patent number 7,804,583
- Issue date Sep 28, 2010
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Filtered device container assembly with shield for a reticle
- Patent number 7,773,198
- Issue date Aug 10, 2010
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Monolithic stage devices providing motion in six degrees of freedom
- Patent number 7,728,462
- Issue date Jun 1, 2010
- Nikon Corporation
- Mark Williams
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Liquid cooled mirror for use in extreme ultraviolet lithography
- Patent number 7,591,561
- Issue date Sep 22, 2009
- Nikon Corporation
- Alton H. Phillips
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Contact material and system for ultra-clean applications
- Patent number 7,551,265
- Issue date Jun 23, 2009
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV reticle handling system and method
- Patent number 7,477,358
- Issue date Jan 13, 2009
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Utilities transfer system in a lithography system
- Patent number 7,375,797
- Issue date May 20, 2008
- Nikon Corporation
- Alton Hugh Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Devices and methods for sensing secure attachment of an object onto...
- Patent number 7,283,201
- Issue date Oct 16, 2007
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus having a reticle stage safety feature
- Patent number 7,259,834
- Issue date Aug 21, 2007
- Nikon Corporation
- Alton Hugh Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple system vibration isolator
- Patent number 7,095,482
- Issue date Aug 22, 2006
- Nikon Corporation
- Alton H. Phillips
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Deformable mirror actuation system
- Patent number 6,989,922
- Issue date Jan 24, 2006
- Nikon Corporation
- Alton Phillips
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR LARGE-SCALE OPTICAL MANUFACTURING
- Publication number 20240367257
- Publication date Nov 7, 2024
- Nikon Corporation
- Daniel Gene SMITH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BALANCED ACTIVE STABILIZERS
- Publication number 20240369797
- Publication date Nov 7, 2024
- Nikon Corporation
- Yoon Jung Jeong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
VIBRATION ISOLATION SYSTEMS WITH REACTION MASSES AND ACTUATORS
- Publication number 20240328478
- Publication date Oct 3, 2024
- Nikon Corporation
- Alton Hugh Phillips
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
POWDER SUPPLY ASSEMBLY FOR ADDITIVE MANUFACTURING
- Publication number 20240227024
- Publication date Jul 11, 2024
- Nikon Corporation
- Alton Hugh Phillips
- B22 - CASTING POWDER METALLURGY
Information Patent Application
POWDER SUPPLY ASSEMBLY FOR ADDITIVE MANUFACTURING
- Publication number 20240131595
- Publication date Apr 25, 2024
- Nikon Corporation
- Alton Hugh Phillips
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVED MELTING IN THREE-DIMENSIONAL PRINT...
- Publication number 20230106321
- Publication date Apr 6, 2023
- Nikon Corporation
- Alton Hugh Phillips
- B22 - CASTING POWDER METALLURGY
Information Patent Application
POWDER SUPPLY ASSEMBLY WITH LEVEL SENSOR AND MULTIPLE STAGES WITH R...
- Publication number 20220305733
- Publication date Sep 29, 2022
- Nikon Corporation
- Victor Itliong Solidum
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
ADDITIVE MANUFACTURING SYSTEM WITH LOCALIZED CONTROLLED ENVIRONMENT
- Publication number 20220288855
- Publication date Sep 15, 2022
- Nikon Corporation
- Alton Hugh Phillips
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
POWER SUPPLY ASSEMBLY FOR ADDITIVE MANUFACTURING SYSTEM
- Publication number 20220266345
- Publication date Aug 25, 2022
- Nikon Corporation
- Joseph Paul Rossi
- B22 - CASTING POWDER METALLURGY
Information Patent Application
NON-COAXIAL ROTATING TURNTABLES FOR ADDITIVE MANUFACTURING
- Publication number 20220212263
- Publication date Jul 7, 2022
- Nikon Corporation
- Alton Hugh Phillips
- B22 - CASTING POWDER METALLURGY
Information Patent Application
VIBRATION ISOLATION SYSTEMS WITH REACTION MASSES AND ACTUATORS
- Publication number 20220112934
- Publication date Apr 14, 2022
- Nikon Corporation
- Alton Hugh Phillips
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
BALANCED ACTIVE STABILIZERS
- Publication number 20220113487
- Publication date Apr 14, 2022
- Nikon Corporation
- Yoon Jung Jeong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
VIBRATION REDUCTION SYSTEM FOR PRECISION ROBOTICS APPLICATIONS
- Publication number 20220111521
- Publication date Apr 14, 2022
- Nikon Corporation
- Michael Birk Binnard
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LITHOGRAPHY TOOL HAVING A RETICLE STAGE CAPABLE OF DYNAMIC RETICLE...
- Publication number 20160011525
- Publication date Jan 14, 2016
- Nikon Corporation
- Alton Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR CLAMPING WAFERS TOGETHER IN ALIGNMENT USING P...
- Publication number 20150122412
- Publication date May 7, 2015
- Nikon Corporation
- Alton H. PHILLIPS
- B32 - LAYERED PRODUCTS
Information Patent Application
WAFER BONDING SYSTEM AND METHOD
- Publication number 20150122414
- Publication date May 7, 2015
- Nikon Corporation
- Alton H. PHILLIPS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS
- Publication number 20140176931
- Publication date Jun 26, 2014
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
MIRROR ASSEMBLY FOR AN EXPOSURE APPARATUS
- Publication number 20140078485
- Publication date Mar 20, 2014
- Alton H Phillips
- G02 - OPTICS
Information Patent Application
FLY'S EYE OPTICAL MIRROR WITH A PLURALITY OF OPTICAL ELEMENTS ROTAT...
- Publication number 20140071419
- Publication date Mar 13, 2014
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
STAGE ASSEMBLY WITH SECURE DEVICE HOLDER
- Publication number 20130250271
- Publication date Sep 26, 2013
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING THE DISTORTION OF A RETICLE
- Publication number 20120120379
- Publication date May 17, 2012
- Alton H. Phillips
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
HIGH HEAT LOAD OPTICS WITH A LIQUID METAL INTERFACE FOR USE IN AN E...
- Publication number 20120099088
- Publication date Apr 26, 2012
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Utilizing In-Situ Measurements Techniques...
- Publication number 20120090332
- Publication date Apr 19, 2012
- Alton Phillips
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES
- Publication number 20110211178
- Publication date Sep 1, 2011
- NIKON CORPORATION
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thermally Conductive Coil and Methods and Systems
- Publication number 20110109419
- Publication date May 12, 2011
- Alexander Cooper
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Element Mirror Assembly and Alignment
- Publication number 20100263192
- Publication date Oct 21, 2010
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
RETICLE ERROR REDUCTION BY COOLING
- Publication number 20100186942
- Publication date Jul 29, 2010
- Alton H. Phillips
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS
- Publication number 20100156198
- Publication date Jun 24, 2010
- Alexander Cooper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High Heat Load Optics with a Liquid Metal Interface for Use in an E...
- Publication number 20100110397
- Publication date May 6, 2010
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND MASK
- Publication number 20100097588
- Publication date Apr 22, 2010
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Alton Phillips

Person

Patents Grantslast 30 patents

Vibration reduction system for precision robotics applications

Balanced active stabilizers

Vibration isolation systems with reaction masses and actuators

Lithography tool having a reticle stage capable of dynamic reticle...

Wafer bonding system and method

Fly's eye optical mirror with a plurality of optical elements rotat...

System and method for clamping wafers together in alignment using p...

Mirror assembly for an exposure apparatus

Exposure method and device manufacturing method including selective...

High heat load optics with a liquid metal interface for use in an e...

High heat load optics with a liquid metal interface for use in an e...

Thermally conductive coil and methods and systems

Method and apparatus for utilizing in-situ measurements techniques...

Temperature-controlled holding devices for planar articles

Method and apparatus for aligning mirror blocks of a multi-element...

Utilities transfer system in a lithography system

Self-correcting optical elements for high-thermal-load optical systems

Devices and methods for reducing residual reticle chucking forces

Hydrostatic liquid-metal deformable optical elements

EUV reticle handling system and method

Filtered device container assembly with shield for a reticle

Monolithic stage devices providing motion in six degrees of freedom

Liquid cooled mirror for use in extreme ultraviolet lithography

Contact material and system for ultra-clean applications

EUV reticle handling system and method

Utilities transfer system in a lithography system

Devices and methods for sensing secure attachment of an object onto...

Method and apparatus having a reticle stage safety feature

Multiple system vibration isolator

Deformable mirror actuation system

Patents Applicationslast 30 patents

METHODS FOR LARGE-SCALE OPTICAL MANUFACTURING

BALANCED ACTIVE STABILIZERS

VIBRATION ISOLATION SYSTEMS WITH REACTION MASSES AND ACTUATORS

POWDER SUPPLY ASSEMBLY FOR ADDITIVE MANUFACTURING

POWDER SUPPLY ASSEMBLY FOR ADDITIVE MANUFACTURING

SYSTEMS AND METHODS FOR IMPROVED MELTING IN THREE-DIMENSIONAL PRINT...

POWDER SUPPLY ASSEMBLY WITH LEVEL SENSOR AND MULTIPLE STAGES WITH R...

ADDITIVE MANUFACTURING SYSTEM WITH LOCALIZED CONTROLLED ENVIRONMENT

POWER SUPPLY ASSEMBLY FOR ADDITIVE MANUFACTURING SYSTEM

NON-COAXIAL ROTATING TURNTABLES FOR ADDITIVE MANUFACTURING

VIBRATION ISOLATION SYSTEMS WITH REACTION MASSES AND ACTUATORS

BALANCED ACTIVE STABILIZERS

VIBRATION REDUCTION SYSTEM FOR PRECISION ROBOTICS APPLICATIONS

LITHOGRAPHY TOOL HAVING A RETICLE STAGE CAPABLE OF DYNAMIC RETICLE...

SYSTEM AND METHOD FOR CLAMPING WAFERS TOGETHER IN ALIGNMENT USING P...

WAFER BONDING SYSTEM AND METHOD

INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS

MIRROR ASSEMBLY FOR AN EXPOSURE APPARATUS

FLY'S EYE OPTICAL MIRROR WITH A PLURALITY OF OPTICAL ELEMENTS ROTAT...

STAGE ASSEMBLY WITH SECURE DEVICE HOLDER

SYSTEM AND METHOD FOR CONTROLLING THE DISTORTION OF A RETICLE

HIGH HEAT LOAD OPTICS WITH A LIQUID METAL INTERFACE FOR USE IN AN E...

Method and Apparatus for Utilizing In-Situ Measurements Techniques...

TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES

Thermally Conductive Coil and Methods and Systems

Multi-Element Mirror Assembly and Alignment

RETICLE ERROR REDUCTION BY COOLING

SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS

High Heat Load Optics with a Liquid Metal Interface for Use in an E...

EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND MASK