ALVARO MAURY

Person

ORLANDO, FL, US

People

Patents Grantslast 30 patents

Information Patent Grant
Additional etching to decrease polishing time for shallow-trench is...
- Patent number 6,372,605
- Issue date Apr 16, 2002
- Agere Systems Guardian Corp.
- Stephen C. Kuehne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making an integrated circuit including alignment marks
- Patent number 6,368,972
- Issue date Apr 9, 2002
- Agere Systems Guardian Corp.
- Alvaro Maury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test structures for testing planarization systems and methods for u...
- Patent number 6,309,900
- Issue date Oct 30, 2001
- Agere Systems Guardian Corp.
- Alvaro Maury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Longer lifetime warm-up wafers for polishing systems
- Patent number 6,287,173
- Issue date Sep 11, 2001
- Lucent Technologies, Inc.
- Annette Margaret Crevasse
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier modification for reduced extraction force
- Patent number 6,281,128
- Issue date Aug 28, 2001
- Agere Systems Guardian Corp.
- Alvaro Maury
- B24 - GRINDING POLISHING
Information Patent Grant
Integrated circuit device having a planar interlevel dielectric layer
- Patent number 6,274,933
- Issue date Aug 14, 2001
- Agere Systems Guardian Corp.
- Mahjoub Ali Abdelgadir
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for performing chemical-mechanical polishing
- Patent number 6,261,958
- Issue date Jul 17, 2001
- Lucent Technologies Inc.
- Annette Margaret Crevasse
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical-mechanical polisher
- Patent number 6,217,419
- Issue date Apr 17, 2001
- Lucent Technologies Inc.
- Alvaro Maury
- B24 - GRINDING POLISHING
Information Patent Grant
Shallow trench isolation
- Patent number 6,146,975
- Issue date Nov 14, 2000
- Lucent Technologies Inc.
- Stephen Carl Kuehne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of mechanical polishing
- Patent number 6,110,831
- Issue date Aug 29, 2000
- Lucent Technologies Inc.
- James Thomas Cargo
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical-mechanical polishing apparatus and method
- Patent number 6,110,012
- Issue date Aug 29, 2000
- Lucent Technologies Inc.
- Alvaro Maury
- B24 - GRINDING POLISHING
Information Patent Grant
Device and method for polishing a semiconductor substrate
- Patent number 6,051,500
- Issue date Apr 18, 2000
- Lucent Technologies Inc.
- Alvaro Maury
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for performing chemical-mechanical polishing
- Patent number 6,033,293
- Issue date Mar 7, 2000
- Lucent Technologies Inc.
- Annette Margaret Crevasse
- B24 - GRINDING POLISHING
Information Patent Grant
Method for using a hardmask to form an opening in a semiconductor s...
- Patent number 6,008,123
- Issue date Dec 28, 1999
- Lucent Technologies Inc.
- Taeho Kook
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MAKING AN INTEGRATED CIRCUIT DEVICE HAVING A PLANAR INTER...
- Publication number 20020001876
- Publication date Jan 3, 2002
- MAHJOUB ALI ABDELGADIR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

ALVARO MAURY

Person

Patents Grantslast 30 patents

Additional etching to decrease polishing time for shallow-trench is...

Method for making an integrated circuit including alignment marks

Test structures for testing planarization systems and methods for u...

Longer lifetime warm-up wafers for polishing systems

Wafer carrier modification for reduced extraction force

Integrated circuit device having a planar interlevel dielectric layer

Method for performing chemical-mechanical polishing

Chemical-mechanical polisher

Shallow trench isolation

Method of mechanical polishing

Chemical-mechanical polishing apparatus and method

Device and method for polishing a semiconductor substrate

Apparatus for performing chemical-mechanical polishing

Method for using a hardmask to form an opening in a semiconductor s...

Patents Applicationslast 30 patents

METHOD OF MAKING AN INTEGRATED CIRCUIT DEVICE HAVING A PLANAR INTER...