Amit Pharkya

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Low temperature formation of high quality silicon oxide films in se...
- Patent number 9,847,221
- Issue date Dec 19, 2017
- Lam Research Corporation
- Kevin M. McLaughlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for eliminating flourine residue in a substrate...
- Patent number 9,601,319
- Issue date Mar 21, 2017
- Lam Research Corporation
- Andrew Stratton Bravo
- B08 - CLEANING