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Amrita Verma
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Pittsburgh, PA, US
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last 30 patents
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Patent Grant
Apparatus for improving film stability of halogen-doped silicon oxi...
Patent number
6,374,770
Issue date
Apr 23, 2002
Applied Materials, Inc.
Peter W. Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for improving the film quality of plasma enhan...
Patent number
6,291,028
Issue date
Sep 18, 2001
Applied Materials, Inc.
Anand Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for improving the film quality of plasma enhan...
Patent number
6,289,843
Issue date
Sep 18, 2001
Applied Materials, Inc.
Anand Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for improving the film quality of plasma enhan...
Patent number
6,121,163
Issue date
Sep 19, 2000
Applied Materials, Inc.
Anand Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for improving film stability of halogen-doped...
Patent number
6,103,601
Issue date
Aug 15, 2000
Applied Materials, Inc.
Peter W. Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal post-deposition treatment of halogen-doped films to improve...
Patent number
6,079,354
Issue date
Jun 27, 2000
Applied Materials, Inc.
Ted Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal post-deposition treatment of halogen-doped films to improve...
Patent number
5,763,010
Issue date
Jun 9, 1998
Applied Materials, Inc.
Ted Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...