Anant Chimmalgi

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 10,976,025
- Issue date Apr 13, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broadband light source including transparent portion with high hydr...
- Patent number 10,522,340
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Lauren Wilson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser sustained plasma light source with graded absorption features
- Patent number 10,283,342
- Issue date May 7, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for laser-sustained plasma illumination
- Patent number 10,257,918
- Issue date Apr 9, 2019
- KLA-Tencor Corporation
- Anant Chimmalgi
- G01 - MEASURING TESTING
Information Patent Grant
System and method for electrodeless plasma ignition in laser-sustai...
- Patent number 10,244,613
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Anant Chimmalgi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Broadband light source including transparent portion with high hydr...
- Patent number 10,032,620
- Issue date Jul 24, 2018
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power broadband light source
- Patent number 9,941,655
- Issue date Apr 10, 2018
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 9,927,094
- Issue date Mar 27, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for inhibiting VUV radiative emission of a laser-...
- Patent number 9,899,205
- Issue date Feb 20, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convective flow in a light-sustai...
- Patent number 9,887,076
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Open plasma lamp for forming a light-sustained plasma
- Patent number 9,721,761
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for inhibiting radiative emission of a laser-sust...
- Patent number 9,615,439
- Issue date Apr 4, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus to reduce thermal stress by regulation and con...
- Patent number 9,534,848
- Issue date Jan 3, 2017
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Light source with nanostructured antireflection layer
- Patent number 9,530,636
- Issue date Dec 27, 2016
- KLA-Tencor Corporation
- Sebaek Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convective flow in a light-sustai...
- Patent number 9,390,902
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Switchable laser and fiber based lamphouse for optimal power output...
- Patent number 9,341,761
- Issue date May 17, 2016
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Grant
Plasma cell for laser-sustained plasma light source
- Patent number 9,318,311
- Issue date Apr 19, 2016
- KLA-Tencor Corporation
- Anant Chimmalgi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Open plasma lamp for forming a light-sustained plasma
- Patent number 9,263,238
- Issue date Feb 16, 2016
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas refraction compensation for laser-sustained plasma bulbs
- Patent number 9,232,622
- Issue date Jan 5, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Diode laser based broad band light sources for wafer inspection tools
- Patent number 9,110,037
- Issue date Aug 18, 2015
- KLA-Tencor Corporation
- Anant Chimmalgi
- G01 - MEASURING TESTING
Information Patent Grant
Diode laser based broad band light sources for wafer inspection tools
- Patent number 8,896,827
- Issue date Nov 25, 2014
- KLA-Tencor Corporation
- Anant Chimmalgi
- G01 - MEASURING TESTING
Information Patent Grant
Gas refraction compensation for laser-sustained plasma bulbs
- Patent number 8,853,655
- Issue date Oct 7, 2014
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20210231292
- Publication date Jul 29, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Broadband Light Source Including Transparent Portion with High Hydr...
- Publication number 20180330937
- Publication date Nov 15, 2018
- KLA-Tencor Corporation
- Lauren Wilson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20180172240
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
System and Method for Inhibiting VUV Radiative Emission of a Laser-...
- Publication number 20170345639
- Publication date Nov 30, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Sustained Plasma Light Source with Graded Absorption Features
- Publication number 20170164457
- Publication date Jun 8, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Electrodeless Plasma Ignition in Laser-Sustai...
- Publication number 20170150590
- Publication date May 25, 2017
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Application
System and Method for Laser-Sustained Plasma Illumination
- Publication number 20170094765
- Publication date Mar 30, 2017
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
- Publication number 20160322211
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Inhibiting Radiative Emission of a Laser-Sust...
- Publication number 20160205758
- Publication date Jul 14, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Open Plasma Lamp for Forming a Light-Sustained Plasma
- Publication number 20160163516
- Publication date Jun 9, 2016
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Broadband Light Source Including Transparent Portion with High Hydr...
- Publication number 20150357179
- Publication date Dec 10, 2015
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Power Broadband Light Source
- Publication number 20150333471
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Anant Chimmalgi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Open Plasma Lamp for Forming a Light-Sustained Plasma
- Publication number 20150279628
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Switchable Laser and Fiber Based Lamphouse for Optimal Power Output...
- Publication number 20150268400
- Publication date Sep 24, 2015
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Application
Light Source with Nanostructured Antireflection Layer
- Publication number 20150271905
- Publication date Sep 24, 2015
- KLA-Tencor Corporation
- Sebaek Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIODE LASER BASED BROAD BAND LIGHT SOURCES FOR WAFER INSPECTION TOOLS
- Publication number 20150042979
- Publication date Feb 12, 2015
- KLA-Tencor Corporation
- Anant Chimmalgi
- G01 - MEASURING TESTING
Information Patent Application
GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS
- Publication number 20140367592
- Publication date Dec 18, 2014
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
- Publication number 20140291546
- Publication date Oct 2, 2014
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS
- Publication number 20140239202
- Publication date Aug 28, 2014
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus to Reduce Thermal Stress by Regulation and Con...
- Publication number 20140060792
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
DIODE LASER BASED BROAD BAND LIGHT SOURCES FOR WAFER INSPECTION TOOLS
- Publication number 20130342825
- Publication date Dec 26, 2013
- Anant Chimmalgi
- G01 - MEASURING TESTING
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20130181595
- Publication date Jul 18, 2013
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE
- Publication number 20130106275
- Publication date May 2, 2013
- KLA-Tencor Corporation
- Anant Chimmalgi
- H01 - BASIC ELECTRIC ELEMENTS

Anant Chimmalgi

Person

Patents Grantslast 30 patents

Plasma cell for providing VUV filtering in a laser-sustained plasma...

Broadband light source including transparent portion with high hydr...

Laser sustained plasma light source with graded absorption features

System and method for laser-sustained plasma illumination

System and method for electrodeless plasma ignition in laser-sustai...

Broadband light source including transparent portion with high hydr...

High power broadband light source

Plasma cell for providing VUV filtering in a laser-sustained plasma...

System and method for inhibiting VUV radiative emission of a laser-...

Method and system for controlling convective flow in a light-sustai...

Open plasma lamp for forming a light-sustained plasma

System and method for inhibiting radiative emission of a laser-sust...

Method and apparatus to reduce thermal stress by regulation and con...

Light source with nanostructured antireflection layer

Method and system for controlling convective flow in a light-sustai...

Switchable laser and fiber based lamphouse for optimal power output...

Plasma cell for laser-sustained plasma light source

Open plasma lamp for forming a light-sustained plasma

Gas refraction compensation for laser-sustained plasma bulbs

Diode laser based broad band light sources for wafer inspection tools

Diode laser based broad band light sources for wafer inspection tools

Gas refraction compensation for laser-sustained plasma bulbs

Patents Applicationslast 30 patents

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

Broadband Light Source Including Transparent Portion with High Hydr...

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

System and Method for Inhibiting VUV Radiative Emission of a Laser-...

Laser Sustained Plasma Light Source with Graded Absorption Features

System and Method for Electrodeless Plasma Ignition in Laser-Sustai...

System and Method for Laser-Sustained Plasma Illumination

Method and System for Controlling Convective Flow in a Light-Sustai...

System and Method for Inhibiting Radiative Emission of a Laser-Sust...

Open Plasma Lamp for Forming a Light-Sustained Plasma

Broadband Light Source Including Transparent Portion with High Hydr...

High Power Broadband Light Source

Open Plasma Lamp for Forming a Light-Sustained Plasma

Switchable Laser and Fiber Based Lamphouse for Optimal Power Output...

Light Source with Nanostructured Antireflection Layer

DIODE LASER BASED BROAD BAND LIGHT SOURCES FOR WAFER INSPECTION TOOLS

GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS

Method and System for Controlling Convective Flow in a Light-Sustai...

GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS

Method and Apparatus to Reduce Thermal Stress by Regulation and Con...

DIODE LASER BASED BROAD BAND LIGHT SOURCES FOR WAFER INSPECTION TOOLS

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE