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Andrea Giovannini
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Lugano, CH
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Patents Grants
last 30 patents
Information
Patent Grant
Method for controlling an interaction between droplet targets and a...
Patent number
9,911,572
Issue date
Mar 6, 2018
ETH Zurich
Nadia Gambino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical collector for collecting extreme ultraviolet radiation, met...
Patent number
9,513,569
Issue date
Dec 6, 2016
ETH Zurich
Franz Dieterich
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Droplet dispensing device and light source comprising such a drople...
Patent number
9,307,625
Issue date
Apr 5, 2016
ETH Zurich
Bob Rollinger
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Extreme ultraviolet light source with a debris-mitigated and cooled...
Patent number
8,723,147
Issue date
May 13, 2014
ETH Zurich
Reza Abhari
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method for Controlling an Interaction Between Droplet Targets and a...
Publication number
20150179401
Publication date
Jun 25, 2015
ETH Zurich
Nadia Gambino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Droplet Dispensing Device and Light Source Comprising Such a Drople...
Publication number
20140151582
Publication date
Jun 5, 2014
ETH Zurich
Bob Rollinger
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
BEAM LINE FOR A SOURCE OF EXTREME ULTRAVIOLET (EUV) RADIATION
Publication number
20130134318
Publication date
May 30, 2013
Reza Abhari
G02 - OPTICS
Information
Patent Application
OPTICAL COLLECTOR COLLECTING EXTREME ULTRAVIOLET RADIATION, METHOD...
Publication number
20130003167
Publication date
Jan 3, 2013
Franz Dieterich
B82 - NANO-TECHNOLOGY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE WITH A DEBRIS-MITIGATED AND COOLED...
Publication number
20120025109
Publication date
Feb 2, 2012
Reza Abhari
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY