Andreas Heisler

Follow

Person

Steinheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Faceted mirror apparatus
- Patent number 7,802,891
- Issue date Sep 28, 2010
- Carl Zeiss SMT AG
- Andreas Seifert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Facet mirror having a number of mirror facets
- Patent number 7,354,168
- Issue date Apr 8, 2008
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Method for the production of a facetted mirror
- Patent number 7,246,909
- Issue date Jul 24, 2007
- Carl Zeiss SMT AG
- Andreas Seifert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Facet mirror having a number of mirror facets
- Patent number 7,090,362
- Issue date Aug 15, 2006
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Illumination system with a plurality of individual gratings
- Patent number 6,836,530
- Issue date Dec 28, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL UNIT HAVING ADJUSTABLE FORCE ACTION ON AN OPTICAL MODULE
- Publication number 20110019171
- Publication date Jan 27, 2011
- Carl Zeiss SMT AG
- Erich Schubert
- G02 - OPTICS
Information Patent Application
FACETED MIRROR APPARATUS
- Publication number 20090097142
- Publication date Apr 16, 2009
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
FACETED MIRROR APPARATUS
- Publication number 20070206301
- Publication date Sep 6, 2007
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
Facet mirrors and a method for producing mirror facets
- Publication number 20070019310
- Publication date Jan 25, 2007
- Carl Zeiss SMT AG
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
Method for the production of a facetted mirror
- Publication number 20050111067
- Publication date May 26, 2005
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
Facet mirror having a number of mirror facets
- Publication number 20050030653
- Publication date Feb 10, 2005
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Illumination system with a plurality of individual gratings
- Publication number 20030099040
- Publication date May 29, 2003
- Carl Zeiss Cemiconductor Manufacturing Technologies AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY