Membership
Tour
Register
Log in
Andreas Wurmbrand
Follow
Person
Aalen, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Mirror module, in particular for a microlithographic projection exp...
Patent number
9,996,015
Issue date
Jun 12, 2018
Carl Zeiss SMT GmbH
Jens Prochnau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical arrangement in a projection exposure apparatus for EUV lith...
Patent number
9,298,111
Issue date
Mar 29, 2016
Carl Zeiss SMT GmbH
Viktor Kulitzki
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,182,679
Issue date
Nov 10, 2015
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
9,081,296
Issue date
Jul 14, 2015
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
8,902,519
Issue date
Dec 2, 2014
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,860,922
Issue date
Oct 14, 2014
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Holding device for an optical element in an objective
Patent number
8,854,602
Issue date
Oct 7, 2014
ASML Netherlands B.V.
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,810,771
Issue date
Aug 19, 2014
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for the low-deformation replaceable mounting of an optical e...
Patent number
8,582,081
Issue date
Nov 12, 2013
Carl Zeiss SMT GmbH
Franz Sorg
G02 - OPTICS
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
8,488,261
Issue date
Jul 16, 2013
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Projection objective of a microlithographic projection exposure app...
Patent number
8,339,576
Issue date
Dec 25, 2012
Carl Zeiss SMT GmbH
Ulrich Loering
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,102,502
Issue date
Jan 24, 2012
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
7,995,296
Issue date
Aug 9, 2011
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
7,768,723
Issue date
Aug 3, 2010
Carl Zeiss SMT AG
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Immersion lithography objective
Patent number
7,649,702
Issue date
Jan 19, 2010
Carl Zeiss SMT AG
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic projection exposure apparatus
Patent number
7,570,343
Issue date
Aug 4, 2009
Carl Zeis SMT AG
Aurelian Dodoc
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,532,304
Issue date
May 12, 2009
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
7,515,363
Issue date
Apr 7, 2009
Carl Zeiss SMT AG
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Device for the low-deformation replaceable mounting of an optical e...
Patent number
7,471,469
Issue date
Dec 30, 2008
Carl Zeiss SMT AG
Franz Sorg
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,352,433
Issue date
Apr 1, 2008
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Replacement apparatus for an optical element
Patent number
7,265,917
Issue date
Sep 4, 2007
Carl Zeiss SMT AG
Jens Kugler
G02 - OPTICS
Information
Patent Grant
Low-deformation support device of an optical element
Patent number
7,085,080
Issue date
Aug 1, 2006
Carl Zeiss SMT AG
Dirk Schaffer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MIRROR MODULE, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXP...
Publication number
20170153552
Publication date
Jun 1, 2017
Carl Zeiss SMT GMBH
Jens Prochnau
G02 - OPTICS
Information
Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
Publication number
20160041475
Publication date
Feb 11, 2016
Carl Zeiss SMT GMBH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Holding Device for an Optical Element in an Objective
Publication number
20150138520
Publication date
May 21, 2015
ASML NETHERLANDS B.V.
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
Publication number
20150070789
Publication date
Mar 12, 2015
Carl Zeiss SMT GMBH
Jens Kugler
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150015858
Publication date
Jan 15, 2015
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...
Publication number
20140063628
Publication date
Mar 6, 2014
Carl Zeiss SMT GMBH
Franz Sorg
G02 - OPTICS
Information
Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
Publication number
20130279029
Publication date
Oct 24, 2013
Jens Kugler
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
Publication number
20120281196
Publication date
Nov 8, 2012
Carl Zeiss SMT GMBH
Ulrich Loering
G02 - OPTICS
Information
Patent Application
OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITH...
Publication number
20120188523
Publication date
Jul 26, 2012
Carl Zeiss SMT GMBH
Viktor Kulitsky
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120120377
Publication date
May 17, 2012
Carl Zeiss SMT AG
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120086926
Publication date
Apr 12, 2012
Carl Zeiss SMT AG
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
Publication number
20110255181
Publication date
Oct 20, 2011
Carl Zeiss SMT GMBH
Jens Kugler
G02 - OPTICS
Information
Patent Application
REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT
Publication number
20100271716
Publication date
Oct 28, 2010
Carl Zeiss SMT AG
Jens Kugler
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090197211
Publication date
Aug 6, 2009
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Replacement Apparatus for an Optical Element
Publication number
20090168207
Publication date
Jul 2, 2009
Carl Zeiss SMT AG
Jens Kugler
G02 - OPTICS
Information
Patent Application
DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL E...
Publication number
20090122288
Publication date
May 14, 2009
Carl Zeiss SMT AG
Franz Sorg
G02 - OPTICS
Information
Patent Application
IMMERSION LITHOGRAPHY OBJECTIVE
Publication number
20080212211
Publication date
Sep 4, 2008
Carl Zeiss SMT AG
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080204679
Publication date
Aug 28, 2008
ASML NETHERLANDS B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Holding Device for an Optical Element in an Objective
Publication number
20080002170
Publication date
Jan 3, 2008
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Replacement apparatus for an optical element
Publication number
20070297074
Publication date
Dec 27, 2007
Jens Kugler
G02 - OPTICS
Information
Patent Application
Microlithographic projection exposure apparatus
Publication number
20060187430
Publication date
Aug 24, 2006
Carl Zeiss SMT AG
Aurelian Dodoc
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device for the low-deformation replaceable mounting of an optical e...
Publication number
20060158749
Publication date
Jul 20, 2006
Franz Sorg
G02 - OPTICS
Information
Patent Application
Replacement apparatus for an optical element
Publication number
20050134972
Publication date
Jun 23, 2005
Jens Kugler
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050128445
Publication date
Jun 16, 2005
ASML NETHERLANDS B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Low-deformation support device of an optical element
Publication number
20050128607
Publication date
Jun 16, 2005
Dirk Schaffer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY