Andrew J. Perry

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for controlling a recess etch process
- Patent number 7,399,711
- Issue date Jul 15, 2008
- Lam Research Corporation
- Andrew J. Perry
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for in-situ monitoring of plasma etch and depo...
- Patent number RE39145
- Issue date Jun 27, 2006
- Lam Research Corporation
- Andrew Perry
- 356 - Optics: measuring and testing
Information Patent Grant
Method for in-situ monitoring of patterned substrate processing usi...
- Patent number 7,019,844
- Issue date Mar 28, 2006
- Lam Research Corporation
- Vijayakumar C. Venugopal
- G01 - MEASURING TESTING
Information Patent Grant
System and method for integrated multi-use optical alignment
- Patent number 6,952,255
- Issue date Oct 4, 2005
- Lam Research Corporation
- Andrew Perry
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for physical vapor deposition
- Patent number 6,168,690
- Issue date Jan 2, 2001
- Lam Research Corporation
- Russell F. Jewett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for in-situ monitoring of plasma etch and depo...
- Patent number 6,160,621
- Issue date Dec 12, 2000
- Lam Research Corporation
- Andrew Perry
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and system for electronic spatial filtering of spectral refl...
- Publication number 20080014748
- Publication date Jan 17, 2008
- Lam Research Corporation
- Andrew Perry
- G01 - MEASURING TESTING
Information Patent Application
System and method for integrated multi-use optical alignment
- Publication number 20050030524
- Publication date Feb 10, 2005
- Lam Research Corp.
- Andrew Perry
- G01 - MEASURING TESTING
Information Patent Application
Method and system for electronic spatial filtering of spectral refl...
- Publication number 20050020073
- Publication date Jan 27, 2005
- LAM RESEARCH CORPORATION
- Andrew Perry
- G01 - MEASURING TESTING
Information Patent Application
Method for controlling a recess etch process
- Publication number 20040087041
- Publication date May 6, 2004
- Andrew J. Perry
- G01 - MEASURING TESTING
Information Patent Application
Method for in-situ monitoring of patterned substrate processing usi...
- Publication number 20040032592
- Publication date Feb 19, 2004
- Vijayakumar C. Venugopal
- G01 - MEASURING TESTING