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Monolithic hard pellicle
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Patent number 7,110,195
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Issue date Sep 19, 2006
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International Business Machines Corporation
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Emily F. Gallagher
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Gray level mask
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Patent number 5,334,467
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Issue date Aug 2, 1994
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International Business Machines Corporation
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John E. Cronin
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method of making a gray level mask
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Patent number 5,213,916
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Issue date May 25, 1993
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International Business Machines Corporation
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John E. Cronin
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Plural level chip masking
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Patent number 5,126,006
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Issue date Jun 30, 1992
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International Business Machines Corp.
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John E. Cronin
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY