Number | Name | Date | Kind |
---|---|---|---|
3649393 | Hatzakis | Mar 1973 | |
3875321 | Gliemeroth et al. | Apr 1975 | |
3930857 | Bendz et al. | Jan 1976 | |
4018938 | Feder et al. | Apr 1977 | |
4040891 | Chang et al. | Aug 1977 | |
4434191 | Cook et al. | Feb 1984 | |
4440841 | Tabuchi | Apr 1984 | |
4507393 | Kassner et al. | Mar 1985 | |
4554259 | Franklin et al. | Nov 1985 | |
4567104 | Wu | Jan 1986 | |
4609632 | Sack | Sep 1986 | |
4670366 | Wu | Jun 1987 | |
4684436 | Burns et al. | Aug 1987 | |
4686162 | Stangl et al. | Aug 1987 | |
4720442 | Shinkai et al. | Jan 1988 | |
4722878 | Watakabe et al. | Feb 1988 | |
4764432 | Kalbitzer | Aug 1988 | |
4764441 | Ohta et al. | Aug 1988 | |
4769347 | Cook et al. | Sep 1988 | |
4770739 | Orvek et al. | Sep 1988 | |
4820326 | Speit | Apr 1989 | |
4894303 | Wu | Jan 1990 |
Entry |
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Cronin, J. E. et al., "Defining Stepped Resist Structure Using E-Beam and Implemented With Proximity Correction Software", IBM Tech. Discl. Bull., vol. 31, No. 7, (Dec. 1988), pp. 286-287. |