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Andrew R. Romano
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Pleasanton, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Photoresist double patterning apparatus
Patent number
8,911,587
Issue date
Dec 16, 2014
Lam Research Corporation
Andrew R. Romano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Protective layer for implant photoresist
Patent number
8,361,564
Issue date
Jan 29, 2013
Lam Research Corporation
Andrew R. Romano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist double patterning
Patent number
8,282,847
Issue date
Oct 9, 2012
Lam Research Corporation
Andrew R. Romano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Double mask self-aligned double patterning technology (SADPT) process
Patent number
7,977,242
Issue date
Jul 12, 2011
Lam Research Corporation
S. M. Reza Sadjadi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PHOTORESIST DOUBLE PATTERNING APPARATUS
Publication number
20130000846
Publication date
Jan 3, 2013
LAM RESEARCH CORPORATION
Andrew R. Romano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROTECTIVE LAYER FOR IMPLANT PHOTORESIST
Publication number
20120328781
Publication date
Dec 27, 2012
LAM RESEARCH CORPORATION
Andrew R. Romano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH WITH HIGH ETCH RATE RESIST MASK
Publication number
20120282780
Publication date
Nov 8, 2012
LAM RESEARCH CORPORATION
Andrew R. Romano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DOUBLE MASK SELF-ALIGNED DOUBLE PATTERNING TECHNOLOGY (SADPT) PROCESS
Publication number
20090215272
Publication date
Aug 27, 2009
LAM RESEARCH CORPORATION
S. M. Reza Sadjadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROTECTIVE LAYER FOR IMPLANT PHOTORESIST
Publication number
20090162553
Publication date
Jun 25, 2009
LAM RESEARCH CORPORATION
Andrew R. Romano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST DOUBLE PATTERNING
Publication number
20090162790
Publication date
Jun 25, 2009
LAM RESEARCH CORPORATION
Andrew R. Romano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ETCH WITH HIGH ETCH RATE RESIST MASK
Publication number
20090163035
Publication date
Jun 25, 2009
LAM RESEARCH CORPORATION
Andrew R. Romano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY