Andrew V. LE

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Advanced in-situ particle detection system for semiconductor substr...
- Patent number 10,883,932
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Lin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced coating method and materials to prevent HDP-CVD chamber ar...
- Patent number 10,655,223
- Issue date May 19, 2020
- Applied Materials, Inc.
- Lin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arcing detection apparatus for plasma processing
- Patent number 10,580,626
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Lin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced in-situ particle detection system for semiconductor substr...
- Patent number 10,365,216
- Issue date Jul 30, 2019
- Applied Materials, Inc.
- Lin Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Multi-function x-ray metrology tool for production inspection/monit...
- Patent number 10,330,612
- Issue date Jun 25, 2019
- Applied Materials, Inc.
- Lin Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Advanced coating method and materials to prevent HDP-CVD chamber ar...
- Patent number 10,208,380
- Issue date Feb 19, 2019
- Applied Materials, Inc.
- Lin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methodology for chamber performance matching for semiconductor equi...
- Patent number 10,192,763
- Issue date Jan 29, 2019
- Applied Materials, Inc.
- Xuesong Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment process for in-situ chamber cleaning efficiency en...
- Patent number 10,002,745
- Issue date Jun 19, 2018
- Applied Materials, Inc.
- Lin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for matching silicon oxide thickness between simi...
- Patent number 7,983,776
- Issue date Jul 19, 2011
- Micrel, Inc.
- Miles Dudman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ADVANCED IN-SITU PARTICLE DETECTION SYSTEM FOR SEMICONDUCTOR SUBSTR...
- Publication number 20190323960
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- Lin ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...
- Publication number 20190169743
- Publication date Jun 6, 2019
- Applied Materials, Inc.
- Lin ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED IN-SITU PARTICLE DETECTION SYSTEM FOR SEMICONDUCTOR SUBSTR...
- Publication number 20180156727
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Lin ZHANG
- G01 - MEASURING TESTING
Information Patent Application
PLASMA TREATMENT PROCESS FOR IN-SITU CHAMBER CLEANING EFFICIENCY EN...
- Publication number 20170323768
- Publication date Nov 9, 2017
- Applied Materials, Inc.
- Lin ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARCING DETECTION APPARATUS FOR PLASMA PROCESSING
- Publication number 20170162370
- Publication date Jun 8, 2017
- Applied Materials, Inc.
- Lin ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...
- Publication number 20170159176
- Publication date Jun 8, 2017
- Applied Materials, Inc.
- Lin ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRODUCTIVITY PECVD TOOL FOR WAFER PROCESSING OF SEMICONDUCTOR...
- Publication number 20170114462
- Publication date Apr 27, 2017
- Applied Materials, Inc.
- Lin ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODOLOGY FOR CHAMBER PERFORMANCE MATCHING FOR SEMICONDUCTOR EQUI...
- Publication number 20170098565
- Publication date Apr 6, 2017
- Applied Materials, Inc.
- Xuesong LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-FUNCTION X-RAY METROLOGY TOOL FOR PRODUCTION INSPECTION/MONIT...
- Publication number 20160077025
- Publication date Mar 17, 2016
- Applied Materials, Inc.
- Lin ZHANG
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING IN-LINE INTERFACIAL OXIDE CONTACT...
- Publication number 20100007363
- Publication date Jan 14, 2010
- MICREL, INC.
- Miles DUDMAN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR MATCHING SILICON OXIDE THICKNESS BETWEEN SIMI...
- Publication number 20090125140
- Publication date May 14, 2009
- MICREL, INC.
- Miles Dudman
- H01 - BASIC ELECTRIC ELEMENTS

Andrew V. LE

Person

Patents Grantslast 30 patents

Advanced in-situ particle detection system for semiconductor substr...

Advanced coating method and materials to prevent HDP-CVD chamber ar...

Arcing detection apparatus for plasma processing

Advanced in-situ particle detection system for semiconductor substr...

Multi-function x-ray metrology tool for production inspection/monit...

Advanced coating method and materials to prevent HDP-CVD chamber ar...

Methodology for chamber performance matching for semiconductor equi...

Plasma treatment process for in-situ chamber cleaning efficiency en...

System and method for matching silicon oxide thickness between simi...

Patents Applicationslast 30 patents

ADVANCED IN-SITU PARTICLE DETECTION SYSTEM FOR SEMICONDUCTOR SUBSTR...

ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...

ADVANCED IN-SITU PARTICLE DETECTION SYSTEM FOR SEMICONDUCTOR SUBSTR...

PLASMA TREATMENT PROCESS FOR IN-SITU CHAMBER CLEANING EFFICIENCY EN...

ARCING DETECTION APPARATUS FOR PLASMA PROCESSING

ADVANCED COATING METHOD AND MATERIALS TO PREVENT HDP-CVD CHAMBER AR...

HIGH PRODUCTIVITY PECVD TOOL FOR WAFER PROCESSING OF SEMICONDUCTOR...

METHODOLOGY FOR CHAMBER PERFORMANCE MATCHING FOR SEMICONDUCTOR EQUI...

MULTI-FUNCTION X-RAY METROLOGY TOOL FOR PRODUCTION INSPECTION/MONIT...

SYSTEM AND METHOD FOR DETERMINING IN-LINE INTERFACIAL OXIDE CONTACT...

SYSTEM AND METHOD FOR MATCHING SILICON OXIDE THICKNESS BETWEEN SIMI...