Andrey S. Tychkov

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Laser focussing module
- Patent number 12,007,693
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflective optical element for a radiation beam
- Patent number 11,237,491
- Issue date Feb 1, 2022
- ASML Netherlands B.V.
- Ramon Mark Hofstra
- G02 - OPTICS
Information Patent Grant
EUV source chamber and gas flow regime for lithographic apparatus,...
- Patent number 10,295,916
- Issue date May 21, 2019
- ASML Netherlands B.V.
- Heine Melle Mulder
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system, lithographic apparatus and method
- Patent number 9,360,762
- Issue date Jun 7, 2016
- ASML Netherlands B.V.
- Andrey Sergeevich Tychkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 7,834,980
- Issue date Nov 16, 2010
- ASML Netherlands B.V.
- Johannes Jacobus Matheus Baselmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SYSTEM AND METHOD FOR A RADIATION SOURCE
- Publication number 20250008634
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Andrey Sergeevich TYCHKOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER FOCUSSING MODULE
- Publication number 20220206397
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reflective Optical Element for a Radiation Beam
- Publication number 20210165336
- Publication date Jun 3, 2021
- ASML NETHERLANDS B.V.
- Ramon Mark HOFSTRA
- G02 - OPTICS
Information Patent Application
EUV SOURCE CHAMBER AND GAS FLOW REGIME FOR LITHOGRAPHIC APPARATUS,...
- Publication number 20180246422
- Publication date Aug 30, 2018
- ASML NETHERLANDS B.V.
- Heine Melle MULDER
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Illumination System, Lithographic Apparatus and Method
- Publication number 20120194794
- Publication date Aug 2, 2012
- ASML NETHERLANDS B.V.
- Andrey Sergeevich TYCHKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080151206
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Johannes Jacobus Matheus Baselmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY