Membership
Tour
Register
Log in
Anthony CT Chan
Follow
Person
Los Altos Hills, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Etch uniformity improvement for single turn internal coil PVD chamber
Patent number
12,136,544
Issue date
Nov 5, 2024
Applied Materials, Inc.
Anthony Chih-Tung Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Top magnets for decreased non-uniformity in PVD
Patent number
12,112,890
Issue date
Oct 8, 2024
Applied Materials, Inc.
Borui Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for extended chamber for through silicon via...
Patent number
11,846,013
Issue date
Dec 19, 2023
Applied Materials, Inc.
David Gunther
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low profile deposition ring for enhanced life
Patent number
11,581,166
Issue date
Feb 14, 2023
Applied Materials, Inc.
Kirankumar Neelasandra Savandaiah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-radius magnetron for physical vapor deposition (PVD) and meth...
Patent number
11,295,938
Issue date
Apr 5, 2022
Applied Materials, Inc.
Jiao Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition ring for a semiconductor processing chamber
Patent number
D933726
Issue date
Oct 19, 2021
Applied Materials, Inc.
Kirankumar Neelasandra Savandaiah
D15 - Machines not elsewhere specified
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D894137
Issue date
Aug 25, 2020
Applied Materials, Inc.
William Johanson
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D851613
Issue date
Jun 18, 2019
Applied Materials, Inc.
William Johanson
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Target sidewall design to reduce particle generation during magnetr...
Patent number
6,620,296
Issue date
Sep 16, 2003
Applied Materials, Inc.
James Van Gogh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for reducing thermal gradients within a substr...
Patent number
6,469,283
Issue date
Oct 22, 2002
Applied Materials, Inc.
Vincent E. Burkhart
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ROTARY ELECTRICAL FEEDTHROUGH INTEGRATION FOR PROCESS CHAMBER
Publication number
20240018646
Publication date
Jan 18, 2024
Applied Materials, Inc.
ANANTHA SUBRAMANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCH UNIFORMITY IMPROVEMENT FOR SINGLE TURN INTERNAL COIL PVD CHAMBER
Publication number
20230141298
Publication date
May 11, 2023
Anthony Chih-Tung CHAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TOP MAGNETS FOR DECREASED NON-UNIFORMITY IN PVD
Publication number
20230088552
Publication date
Mar 23, 2023
Applied Materials, Inc.
Borui Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PULSING PLASMA TREATMENT FOR FILM DENSIFICATION
Publication number
20220364230
Publication date
Nov 17, 2022
Rui LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR EXTENDED CHAMBER FOR THROUGH SILICON VIA...
Publication number
20220033956
Publication date
Feb 3, 2022
Applied Materials, Inc.
David GUNTHER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW PROFILE DEPOSITION RING FOR ENHANCED LIFE
Publication number
20220037128
Publication date
Feb 3, 2022
Applied Materials, Inc.
Kirankumar Neelasandra SAVANDAIAH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-RADIUS MAGNETRON FOR PHYSICAL VAPOR DEPOSITION (PVD) AND METH...
Publication number
20210407778
Publication date
Dec 30, 2021
Applied Materials, Inc.
Jiao SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for controlling darkspace gap in a chamber
Publication number
20040251130
Publication date
Dec 16, 2004
APPLIED MATERIALS, INC.
Alan Barry Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Target sidewall design to reduce particle generation during magnetr...
Publication number
20020121436
Publication date
Sep 5, 2002
Applied Materials, Inc.
James Van Gogh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...