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Anthony S. Geller
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Albuquerque, NM, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and apparatus for use with extreme ultraviolet light having...
Patent number
9,389,180
Issue date
Jul 12, 2016
KLA-Tencor Corporation
Francis C. Chilese
G01 - MEASURING TESTING
Information
Patent Grant
Particle control near reticle and optics using showerhead
Patent number
9,244,368
Issue date
Jan 26, 2016
KLA-Tencor Corporation
Gildardo R. Delgado
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduction of particle deposition on substrates using temperature gr...
Patent number
6,110,844
Issue date
Aug 29, 2000
Sandia Corporation
Daniel J. Rader
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle dispersing system and method for testing semiconductor man...
Patent number
5,777,245
Issue date
Jul 7, 1998
Applied Materials, Inc.
Madhavi Chandrachood
G01 - MEASURING TESTING
Information
Patent Grant
Particle-free microchip processing
Patent number
5,522,933
Issue date
Jun 4, 1996
Anthony S. Geller
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...
Publication number
20140231659
Publication date
Aug 21, 2014
Frank Chilese
G01 - MEASURING TESTING
Information
Patent Application
PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD
Publication number
20140085618
Publication date
Mar 27, 2014
Gildardo R. Delgado
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY