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Antti H. Rahtu

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  • Vantaa, FI
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Patents Grantslast 30 patents

  • Information Patent Grant

    ALD of metal-containing films using cyclopentadienyl compounds
    • Patent number 11,155,919
    • Issue date Oct 26, 2021
    • ASM IP Holding B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 10,964,534
    • Issue date Mar 30, 2021
    • ASM International
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD of hafnium-containing films using cyclopentadienyl compounds
    • Patent number 10,294,563
    • Issue date May 21, 2019
    • ASM IP Holding B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 10,297,444
    • Issue date May 21, 2019
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD of metal-containing films using cyclopentadienly compounds
    • Patent number 9,850,575
    • Issue date Dec 26, 2017
    • ASM IP Holding B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 9,831,094
    • Issue date Nov 28, 2017
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD of metal-containing films using cyclopentadienyl compounds
    • Patent number 9,677,175
    • Issue date Jun 13, 2017
    • ASM IP Holding, B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD of metal-containing films using cyclopentadienyl compounds
    • Patent number 9,670,582
    • Issue date Jun 6, 2017
    • ASM IP Holding B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced deposition of noble metals
    • Patent number 9,587,307
    • Issue date Mar 7, 2017
    • ASM International N.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD of zirconium-containing films using cyclopentadienyl compounds
    • Patent number 9,273,391
    • Issue date Mar 1, 2016
    • ASM IP Holding B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 9,127,351
    • Issue date Sep 8, 2015
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 8,993,055
    • Issue date Mar 31, 2015
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD of metal-containing films using cyclopentadienyl compounds
    • Patent number 8,795,771
    • Issue date Aug 5, 2014
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Metal oxide films
    • Patent number 8,685,165
    • Issue date Apr 1, 2014
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced deposition of noble metals
    • Patent number 8,501,275
    • Issue date Aug 6, 2013
    • ASM International N.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for the deposition of a film by CVD or ALD
    • Patent number 8,048,484
    • Issue date Nov 1, 2011
    • ASM International N.V.
    • Antti H. Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced deposition of noble metals
    • Patent number 8,025,922
    • Issue date Sep 27, 2011
    • ASM International N.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition of thin films on germanium
    • Patent number 7,704,896
    • Issue date Apr 27, 2010
    • ASM International, NV.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for growing thin oxide films
    • Patent number 7,377,976
    • Issue date May 27, 2008
    • Mikko Ritala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for growing thin oxide films
    • Patent number 6,932,867
    • Issue date Aug 23, 2005
    • ASM International, NV.
    • Mikko Ritala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method for growing thin oxide films
    • Patent number 6,632,279
    • Issue date Oct 14, 2003
    • ASM Microchemistry, Oy
    • Mikko Ritala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS
    • Publication number 20220178027
    • Publication date Jun 9, 2022
    • ASM IP HOLDING B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS
    • Publication number 20200024738
    • Publication date Jan 23, 2020
    • ASM IP HOLDING B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20190267231
    • Publication date Aug 29, 2019
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20180130666
    • Publication date May 10, 2018
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS
    • Publication number 20170369997
    • Publication date Dec 28, 2017
    • ASM IP HOLDING B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS
    • Publication number 20170362709
    • Publication date Dec 21, 2017
    • ASM IP HOLDING B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS
    • Publication number 20170081762
    • Publication date Mar 23, 2017
    • ASM IP HOLDING B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS
    • Publication number 20160230277
    • Publication date Aug 11, 2016
    • ASM IP HOLDING B.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20160118262
    • Publication date Apr 28, 2016
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS
    • Publication number 20150017348
    • Publication date Jan 15, 2015
    • ASM INTERNATIONAL N.V.
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED DEPOSITION OF NOBLE METALS
    • Publication number 20140087076
    • Publication date Mar 27, 2014
    • ASM INTERNATIONAL N.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20130183445
    • Publication date Jul 18, 2013
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED DEPOSITION OF NOBLE METALS
    • Publication number 20120189774
    • Publication date Jul 26, 2012
    • ASM INTERNATIONAL N.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ALD of metal-containing films using cyclopentadienyl compounds
    • Publication number 20080102205
    • Publication date May 1, 2008
    • Sean T. Barry
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METAL OXIDE FILMS
    • Publication number 20080072819
    • Publication date Mar 27, 2008
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Enhanced thin film deposition
    • Publication number 20070148350
    • Publication date Jun 28, 2007
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method for the deposition of a film by CVD or ALD
    • Publication number 20070123060
    • Publication date May 31, 2007
    • Antti H. Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Enhanced deposition of noble metals
    • Publication number 20070036892
    • Publication date Feb 15, 2007
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic layer deposition of thin films on germanium
    • Publication number 20060292872
    • Publication date Dec 28, 2006
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Oxide films containing titanium
    • Publication number 20060219157
    • Publication date Oct 5, 2006
    • Antti Rahtu
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Method for growing thin oxide films
    • Publication number 20060068992
    • Publication date Mar 30, 2006
    • Mikko Ritala
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Method for growing thin oxide films
    • Publication number 20040007171
    • Publication date Jan 15, 2004
    • Mikko Ritala
    • C30 - CRYSTAL GROWTH