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Arie Jeffrey Den Boef
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Waalre, NL
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last 30 patents
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Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20190064677
Publication date
Feb 28, 2019
ASML NETHERLANDS B.V.
Martin Jacobus Johan Jak
G02 - OPTICS
Information
Patent Application
Alignment system and method
Publication number
20080088956
Publication date
Apr 17, 2008
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Latent overlay metrology
Publication number
20060109463
Publication date
May 25, 2006
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
Publication number
20060066855
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Arie Jeffrey Maria Den Boef
G01 - MEASURING TESTING
Information
Patent Application
Alignment system and method
Publication number
20060007446
Publication date
Jan 12, 2006
ASML NETHERLANDS B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Test pattern, inspection method, and device manufacturing method
Publication number
20040119970
Publication date
Jun 24, 2004
Mircea Dusa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY