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Arjen BOOGAARD
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Deventer, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,444,644
Issue date
Oct 15, 2019
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Membranes for use within a lithographic apparatus and a lithographi...
Patent number
10,228,615
Issue date
Mar 12, 2019
ASML Netherlands B.V.
Andrey Alexandrovich Nikipelov
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,146,143
Issue date
Dec 4, 2018
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,804,509
Issue date
Oct 31, 2017
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source-collector and method for manufacture
Patent number
9,773,578
Issue date
Sep 26, 2017
ASML Netherlands B.V.
Alexey Sergeevich Kuznetsov
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,594,308
Issue date
Mar 14, 2017
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,213,247
Issue date
Dec 15, 2015
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
8,830,446
Issue date
Sep 9, 2014
ASML Netherlands B.V.
Arjen Boogaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,711,333
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus
Patent number
8,542,341
Issue date
Sep 24, 2013
ASML Netherlands B.V.
Arjen Boogaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,557,901
Issue date
Jul 7, 2009
ASML Netherlands B.V.
Thimotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, coatings for exposure apparatus, lithographic a...
Patent number
7,450,217
Issue date
Nov 11, 2008
ASML Netherlands B.V.
Arjen Boogaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,184,122
Issue date
Feb 27, 2007
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190086820
Publication date
Mar 21, 2019
ASML NETHERLANDS B.V.
Timotheus Franciscus SENGERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180046095
Publication date
Feb 15, 2018
ASML NETHERLANDS B.V.
Timotheus Franciscus SENGERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHI...
Publication number
20170205704
Publication date
Jul 20, 2017
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170176876
Publication date
Jun 22, 2017
ASML NETHERLANDS B.V.
Timotheus Franciscus SENGERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160070178
Publication date
Mar 10, 2016
ASML NETHERLANDS B.V.
Timotheus Franciscus SENGERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation Source-Collector and Method for Manufacture
Publication number
20160012929
Publication date
Jan 14, 2016
ASML NETHERLANDS B.V.
Alexey Sergeevich KUZNETSOV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140313494
Publication date
Oct 23, 2014
ASML NETHERLANDS B.V.
Timotheus Franciscus SENGERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS
Publication number
20130286374
Publication date
Oct 31, 2013
ASML NETHERLANDS B.V.
Arjen BOOGAARD
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090251674
Publication date
Oct 8, 2009
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus
Publication number
20090027642
Publication date
Jan 29, 2009
ASML NETHERLANDS B.V.
Arjen Boogaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070097343
Publication date
May 3, 2007
ASML NETHERLANDS B.V.
Thimotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, coatings for exposure apparatus, lithographic a...
Publication number
20060152696
Publication date
Jul 13, 2006
ASML NETHERLANDS B.V.
Arjen Boogaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050041225
Publication date
Feb 24, 2005
ASML NETHERLANDS B.V.
Thimotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY