Arnold Kholodenko

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing chamber with a grounded electrode assembly
- Patent number 9,905,402
- Issue date Feb 27, 2018
- Lam Research Corporation
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing chamber with a grounded electrode assembly
- Patent number 9,111,968
- Issue date Aug 18, 2015
- Lam Research Corporation
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Proximity head having a fluid resistor
- Patent number 8,900,400
- Issue date Dec 2, 2014
- Lam Research Corporation
- Arnold Kholodenko
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multi-stage substrate cleaning method and apparatus
- Patent number 8,757,177
- Issue date Jun 24, 2014
- Lam Research Corporation
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Grant
Confinement of foam delivered by a proximity head
- Patent number 8,739,805
- Issue date Jun 3, 2014
- Lam Research Corporation
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Grant
Single substrate processing head for particle removal using low vis...
- Patent number 8,584,613
- Issue date Nov 19, 2013
- Lam Research Corporation
- Arnold Kholodenko
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for using generator for foam to clean substrate
- Patent number 8,557,051
- Issue date Oct 15, 2013
- Lam Research Corporation
- Arnold Kholodenko
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Multi-stage substrate cleaning method and apparatus
- Patent number 8,317,934
- Issue date Nov 27, 2012
- Lam Research Corporation
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Grant
Apparatus for substantially uniform fluid flow rates relative to a...
- Patent number 8,317,966
- Issue date Nov 27, 2012
- Lam Research Corporation
- Arnold Kholodenko
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System, method and apparatus for maintaining separation of liquids...
- Patent number 8,313,582
- Issue date Nov 20, 2012
- Lam Research Corporation
- Robert O'Donnell
- B08 - CLEANING
Information Patent Grant
Method for manufacturing a hybrid composite wafer carrier for wet c...
- Patent number 8,292,697
- Issue date Oct 23, 2012
- Lam Research Corporation
- Wing Lau Cheng
- B32 - LAYERED PRODUCTS
Information Patent Grant
Wafer carrier drive apparatus and method for operating the same
- Patent number 8,261,905
- Issue date Sep 11, 2012
- Lam Research Corporation
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ morphological characterization of foam for a proximity head
- Patent number 8,246,755
- Issue date Aug 21, 2012
- Lam Research Corporation
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Generator for foam to clean substrate
- Patent number 8,161,984
- Issue date Apr 24, 2012
- Lam Research Corporation
- Arnold Kholodenko
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Hybrid composite wafer carrier for wet clean equipment
- Patent number 8,146,902
- Issue date Apr 3, 2012
- Lam Research Corporation
- Wing Lau Cheng
- B32 - LAYERED PRODUCTS
Information Patent Grant
System, method and apparatus for maintaining separation of liquids...
- Patent number 8,141,566
- Issue date Mar 27, 2012
- Lam Research Corporation
- Robert O'Donnell
- B08 - CLEANING
Information Patent Grant
Methods of configuring a proximity head that provides uniform fluid...
- Patent number 7,998,304
- Issue date Aug 16, 2011
- Lam Research Corporation
- Arnold Kholodenko
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Apparatus for an optimized plasma chamber grounded electrode assembly
- Patent number 7,743,730
- Issue date Jun 29, 2010
- Lam Research Corporation
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power electrical connector for a laminated heater
- Patent number 7,699,634
- Issue date Apr 20, 2010
- Lam Research Corporation
- Arnold Kholodenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for fabricating large-surface area polycrystalline silico...
- Patent number 7,572,334
- Issue date Aug 11, 2009
- Applied Materials, Inc.
- Arnold V. Kholodenko
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for encapsulation of an edge of a substrate du...
- Patent number 6,908,540
- Issue date Jun 21, 2005
- Applied Materials, Inc.
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Efficient cleaning by secondary in-situ activation of etch precurso...
- Patent number 6,828,241
- Issue date Dec 7, 2004
- Applied Materials, Inc.
- Arnold V. Kholodenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for regulating temperature of a process kit in a semicond...
- Patent number 6,795,292
- Issue date Sep 21, 2004
- Dennis Grimard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature electrical connector
- Patent number 6,736,668
- Issue date May 18, 2004
- Arnold V. Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck having composite dielectric layer and method of...
- Patent number 6,721,162
- Issue date Apr 13, 2004
- Applied Materials Inc.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for wafer rinse and clean and edge etching
- Patent number 6,689,418
- Issue date Feb 10, 2004
- Applied Materials Inc.
- Donald J. K. Olgado
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Process chamber having multiple gas distributors and method
- Patent number 6,676,760
- Issue date Jan 13, 2004
- Appiled Materials, Inc.
- Arnold V. Kholodenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support tolerant to thermal expansion stresses
- Patent number 6,583,980
- Issue date Jun 24, 2003
- Applied Materials Inc.
- You Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a semiconductor wafer support chuck apparatus...
- Patent number 6,572,814
- Issue date Jun 3, 2003
- Applied Materials Inc.
- Shamouil Shamoulian
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck having heater and method
- Patent number 6,538,872
- Issue date Mar 25, 2003
- Applied Materials, Inc.
- You Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma Processing Chamber With a Grounded Electrode Assembly
- Publication number 20150325416
- Publication date Nov 12, 2015
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Confinement of Foam Delivered by a Proximity Head
- Publication number 20140251382
- Publication date Sep 11, 2014
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Single Substrate Processing Head For Particle Removal Using Low Vis...
- Publication number 20140041581
- Publication date Feb 13, 2014
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STAGE SUBSTRATE CLEANING METHOD AND APPARATUS
- Publication number 20130068261
- Publication date Mar 21, 2013
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Application
Proximity Head Having a Fluid Resistor
- Publication number 20130048765
- Publication date Feb 28, 2013
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Using Generator for Foam to Clean Substrate
- Publication number 20120255618
- Publication date Oct 11, 2012
- Arnold Kholodenko
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method for Manufacturing a Hybrid Composite Wafer Carrier for Wet C...
- Publication number 20120168079
- Publication date Jul 5, 2012
- LAM RESEARCH CORPORATION
- Wing Lau Cheng
- B32 - LAYERED PRODUCTS
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR MAINTAINING SEPARATION OF LIQUIDS...
- Publication number 20120138098
- Publication date Jun 7, 2012
- Robert O'Donnell
- B08 - CLEANING
Information Patent Application
IN SITU MORPHOLOGICAL CHARACTERIZATION OF FOAM FOR A PROXIMITY HEAD
- Publication number 20110100399
- Publication date May 5, 2011
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Stage Substrate Cleaning Method and Apparatus
- Publication number 20100288311
- Publication date Nov 18, 2010
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING CHAMBER WITH A GROUNDED ELECTRODE ASSEMBLY
- Publication number 20100263592
- Publication date Oct 21, 2010
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer Carrier Drive Apparatus and Method for Operating the Same
- Publication number 20100230243
- Publication date Sep 16, 2010
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Confinement of Foam Delivered by a Proximity Head
- Publication number 20100126528
- Publication date May 27, 2010
- Arnold Kholodenko
- B08 - CLEANING
Information Patent Application
APPARATUS FOR SUBSTANTIALLY UNIFORM FLUID FLOW RATES RELATIVE TO A...
- Publication number 20100037922
- Publication date Feb 18, 2010
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GENERATOR FOR FOAM TO CLEAN SUBSTRATE
- Publication number 20100024842
- Publication date Feb 4, 2010
- Arnold Kholodenko
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SINGLE SUBSTRATE PROCESSING HEAD FOR PARTICLE REMOVAL USING LOW VIS...
- Publication number 20090320942
- Publication date Dec 31, 2009
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF CONFIGURING A PROXIMITY HEAD THAT PROVIDES UNIFORM FLUID...
- Publication number 20090159201
- Publication date Jun 25, 2009
- Arnold Kholodenko
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
System, method and apparatus for maintaining separation of liquids...
- Publication number 20080314422
- Publication date Dec 25, 2008
- LAM RESEARCH CORPORATION
- Robert O'Donnell
- B08 - CLEANING
Information Patent Application
High Power Electrical Connector for a Laminated Heater
- Publication number 20080227323
- Publication date Sep 18, 2008
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HYBRID COMPOSITE WAFER CARRIER FOR WET CLEAN EQUIPMENT
- Publication number 20080152922
- Publication date Jun 26, 2008
- Wing Lau Cheng
- B32 - LAYERED PRODUCTS
Information Patent Application
Chemical resistant semiconductor processing chamber bodies
- Publication number 20080038448
- Publication date Feb 14, 2008
- Lam Research Corp.
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for fabricating large-surface area polycrystalline silico...
- Publication number 20070158654
- Publication date Jul 12, 2007
- Arnold V. Kholodenko
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Apparatus for an optimized plasma chamber grounded electrode assembly
- Publication number 20070137573
- Publication date Jun 21, 2007
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck having dielectric member with stacked layers an...
- Publication number 20040190215
- Publication date Sep 30, 2004
- APPLIED MATERIALS, INC.
- Edwin C. Weldon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Actively-controlled electrostatic chuck heater
- Publication number 20040081439
- Publication date Apr 29, 2004
- APPLIED MATERIALS, INC.
- Arnold Kholodenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Efficient cleaning by secondary in-situ activation of etch precurso...
- Publication number 20030129835
- Publication date Jul 10, 2003
- Applied Materials Inc.
- Arnold V. Kholodenko
- B08 - CLEANING
Information Patent Application
Process chamber having multiple gas distributors and method
- Publication number 20030033979
- Publication date Feb 20, 2003
- APPLIED MATERIALS, INC.
- Arnold V. Kholodenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for wafer rinse and clean and edge etching
- Publication number 20030024557
- Publication date Feb 6, 2003
- Donald J.K. Olgado
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Method and apparatus for sealing a substrate surface during an elec...
- Publication number 20030019741
- Publication date Jan 30, 2003
- APPLIED MATERIALS, INC.
- Arnold V. Kholodenko
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for encapsulation of an edge of a substrate du...
- Publication number 20030010640
- Publication date Jan 16, 2003
- APPLIED MATERIALS, INC.
- Arnold Kholodenko
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Arnold Kholodenko

Person

Patents Grantslast 30 patents

Plasma processing chamber with a grounded electrode assembly

Plasma processing chamber with a grounded electrode assembly

Proximity head having a fluid resistor

Multi-stage substrate cleaning method and apparatus

Confinement of foam delivered by a proximity head

Single substrate processing head for particle removal using low vis...

Method for using generator for foam to clean substrate

Multi-stage substrate cleaning method and apparatus

Apparatus for substantially uniform fluid flow rates relative to a...

System, method and apparatus for maintaining separation of liquids...

Method for manufacturing a hybrid composite wafer carrier for wet c...

Wafer carrier drive apparatus and method for operating the same

In situ morphological characterization of foam for a proximity head

Generator for foam to clean substrate

Hybrid composite wafer carrier for wet clean equipment

System, method and apparatus for maintaining separation of liquids...

Methods of configuring a proximity head that provides uniform fluid...

Apparatus for an optimized plasma chamber grounded electrode assembly

High power electrical connector for a laminated heater

Apparatus for fabricating large-surface area polycrystalline silico...

Method and apparatus for encapsulation of an edge of a substrate du...

Efficient cleaning by secondary in-situ activation of etch precurso...

Apparatus for regulating temperature of a process kit in a semicond...

High temperature electrical connector

Electrostatic chuck having composite dielectric layer and method of...

Apparatus for wafer rinse and clean and edge etching

Process chamber having multiple gas distributors and method

Substrate support tolerant to thermal expansion stresses

Method of fabricating a semiconductor wafer support chuck apparatus...

Electrostatic chuck having heater and method

Patents Applicationslast 30 patents

Plasma Processing Chamber With a Grounded Electrode Assembly

Methods for Confinement of Foam Delivered by a Proximity Head

Single Substrate Processing Head For Particle Removal Using Low Vis...

MULTI-STAGE SUBSTRATE CLEANING METHOD AND APPARATUS

Proximity Head Having a Fluid Resistor

Method for Using Generator for Foam to Clean Substrate

Method for Manufacturing a Hybrid Composite Wafer Carrier for Wet C...

SYSTEM, METHOD AND APPARATUS FOR MAINTAINING SEPARATION OF LIQUIDS...

IN SITU MORPHOLOGICAL CHARACTERIZATION OF FOAM FOR A PROXIMITY HEAD

Multi-Stage Substrate Cleaning Method and Apparatus

PLASMA PROCESSING CHAMBER WITH A GROUNDED ELECTRODE ASSEMBLY

Wafer Carrier Drive Apparatus and Method for Operating the Same

Confinement of Foam Delivered by a Proximity Head

APPARATUS FOR SUBSTANTIALLY UNIFORM FLUID FLOW RATES RELATIVE TO A...

GENERATOR FOR FOAM TO CLEAN SUBSTRATE

SINGLE SUBSTRATE PROCESSING HEAD FOR PARTICLE REMOVAL USING LOW VIS...

METHODS OF CONFIGURING A PROXIMITY HEAD THAT PROVIDES UNIFORM FLUID...

System, method and apparatus for maintaining separation of liquids...

High Power Electrical Connector for a Laminated Heater

HYBRID COMPOSITE WAFER CARRIER FOR WET CLEAN EQUIPMENT

Chemical resistant semiconductor processing chamber bodies

Apparatus for fabricating large-surface area polycrystalline silico...

Apparatus for an optimized plasma chamber grounded electrode assembly

Electrostatic chuck having dielectric member with stacked layers an...

Actively-controlled electrostatic chuck heater

Efficient cleaning by secondary in-situ activation of etch precurso...

Process chamber having multiple gas distributors and method

Apparatus for wafer rinse and clean and edge etching

Method and apparatus for sealing a substrate surface during an elec...

Method and apparatus for encapsulation of an edge of a substrate du...