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Arthur M. HOWALD
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Pleasanton, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for tuning a MHz RF generator within a cycle of...
Patent number
11,929,235
Issue date
Mar 12, 2024
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for reducing power reflected towards a higher f...
Patent number
10,911,081
Issue date
Feb 2, 2021
Lam Research Corporation
Arthur M. Howald
G05 - CONTROLLING REGULATING
Information
Patent Grant
Systems and methods for tuning an impedance matching network in a s...
Patent number
10,853,444
Issue date
Dec 1, 2020
Lam Research Corporation
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Feedback control system for iterative etch process
Patent number
10,832,979
Issue date
Nov 10, 2020
Lam Research Corporation
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Grant
Segmenting a model within a plasma system
Patent number
10,762,266
Issue date
Sep 1, 2020
Lam Research Corporation
John C. Valcore
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for tuning an impedance matching network in a s...
Patent number
10,621,265
Issue date
Apr 14, 2020
Lam Research Corporation
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Segmenting a model within a plasma system
Patent number
10,474,780
Issue date
Nov 12, 2019
Lam Research Corporation
John C. Valcore
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for using computer-generated models to reduce r...
Patent number
10,469,108
Issue date
Nov 5, 2019
Lam Research Corporation
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for tuning an impedance matching network in a s...
Patent number
10,403,482
Issue date
Sep 3, 2019
Lam Research Corporation
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for tuning an impedance matching network in a s...
Patent number
10,296,676
Issue date
May 21, 2019
Lam Research Corporation
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for using computer-generated models to reduce r...
Patent number
10,276,350
Issue date
Apr 30, 2019
Lam Research Corporation
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for increasing efficiency of delivered power of...
Patent number
10,256,078
Issue date
Apr 9, 2019
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for increasing efficiency of delivered power of...
Patent number
10,020,168
Issue date
Jul 10, 2018
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cable power loss determination for virtual metrology
Patent number
9,927,481
Issue date
Mar 27, 2018
Lam Research Corporation
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for using one or more fixtures and efficiency t...
Patent number
9,837,252
Issue date
Dec 5, 2017
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for using multiple inductive and capacitive fix...
Patent number
9,831,071
Issue date
Nov 28, 2017
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Segmenting a model within a plasma system
Patent number
9,779,196
Issue date
Oct 3, 2017
Lam Research Corporation
John C. Valcore
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for providing characteristics of an impedance m...
Patent number
9,720,022
Issue date
Aug 1, 2017
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for tuning an impedance matching network in a s...
Patent number
9,711,332
Issue date
Jul 18, 2017
Lam Research Corporation
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Cable power loss determination for virtual metrology
Patent number
9,594,105
Issue date
Mar 14, 2017
Lam Research Corporation
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Grant
Controlled ambient system for interface engineering
Patent number
9,117,860
Issue date
Aug 25, 2015
Lam Research Corporation
John Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processes and systems for engineering a copper surface for selectiv...
Patent number
8,771,804
Issue date
Jul 8, 2014
Lam Research Corporation
Yezdi Dordi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processes and systems for engineering a silicon-type surface for se...
Patent number
8,747,960
Issue date
Jun 10, 2014
Lam Research Corporation
Yezdi Dordi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Antenna for plasma processor and apparatus
Patent number
8,454,794
Issue date
Jun 4, 2013
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Antenna for plasma processor and apparatus
Patent number
8,277,604
Issue date
Oct 2, 2012
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processes and systems for engineering a barrier surface for copper...
Patent number
8,241,701
Issue date
Aug 14, 2012
Lam Research Corporation
Yezdi Dordi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System, method and apparatus for self-cleaning dry etch
Patent number
8,211,238
Issue date
Jul 3, 2012
Lam Research Corporation
Andrew D. Bailey, III
B08 - CLEANING
Information
Patent Grant
Methods of low-K dielectric and metal process integration
Patent number
8,084,356
Issue date
Dec 27, 2011
Lam Research Corporation
Yezdi N. Dordi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Antenna for plasma processor apparatus
Patent number
7,905,982
Issue date
Mar 15, 2011
Lam Research Corporation
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal methods for cleaning post-CMP wafers
Patent number
7,884,017
Issue date
Feb 8, 2011
Lam Research Corporation
Zhonghui Alex Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR TUNING A MHZ RF GENERATOR WITHIN A CYCLE OF...
Publication number
20240186111
Publication date
Jun 6, 2024
LAM RESEARCH CORPORATION
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR TUNING A MHZ RF GENERATOR WITHIN A CYCLE OF...
Publication number
20220165543
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A S...
Publication number
20200218774
Publication date
Jul 9, 2020
LAM RESEARCH CORPORATION
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEGMENTING A MODEL WITHIN A PLASMA SYSTEM
Publication number
20200074034
Publication date
Mar 5, 2020
LAM RESEARCH CORPORATION
John C. Valcore
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING POWER REFLECTED TOWARDS A HIGHER F...
Publication number
20200067545
Publication date
Feb 27, 2020
LAM RESEARCH CORPORATION
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A S...
Publication number
20190272306
Publication date
Sep 5, 2019
LAM RESEARCH CORPORATION
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Feedback Control System for Iterative Etch Process
Publication number
20190259674
Publication date
Aug 22, 2019
LAM RESEARCH CORPORATION
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Application
Systems and Methods for Increasing Efficiency of Delivered Power of...
Publication number
20190027342
Publication date
Jan 24, 2019
LAM RESEARCH CORPORATION
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Segmenting A Model Within A Plasma System
Publication number
20180018418
Publication date
Jan 18, 2018
LAM RESEARCH CORPORATION
John C. Valcore
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A S...
Publication number
20170294293
Publication date
Oct 12, 2017
LAM RESEARCH CORPORATION
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Cable Power Loss Determination For Virtual Metrology
Publication number
20170146581
Publication date
May 25, 2017
LAM RESEARCH CORPORATION
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A S...
Publication number
20170103872
Publication date
Apr 13, 2017
LAM RESEARCH CORPORATION
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR PROVIDING CHARACTERISTICS OF AN IMPEDANCE M...
Publication number
20160343548
Publication date
Nov 24, 2016
LAM RESEARCH CORPORATION
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR USING ONE OR MORE FIXTURES AND EFFICIENCY T...
Publication number
20160322207
Publication date
Nov 3, 2016
LAM RESEARCH CORPORATION
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING POWER REFLECTED TOWARDS A HIGHER F...
Publication number
20160308560
Publication date
Oct 20, 2016
LAM RESEARCH CORPORATION
Arthur M. Howald
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING REFLECTED POWER DURING STATE TRANS...
Publication number
20160307736
Publication date
Oct 20, 2016
LAM RESEARCH CORPORATION
Arthur M. Howald
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR TUNING AN IMPEDANCE MATCHING NETWORK IN A S...
Publication number
20160259872
Publication date
Sep 8, 2016
LAM RESEARCH CORPORATION
Arthur M. Howald
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS AND METHODS FOR USING MULTIPLE INDUCTIVE AND CAPACITIVE FIX...
Publication number
20160240356
Publication date
Aug 18, 2016
LAM RESEARCH CORPORATION
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Application
PROCESSES AND SYSTEMS FOR ENGINEERING A BARRIER SURFACE FOR COPPER...
Publication number
20150214093
Publication date
Jul 30, 2015
LAM RESEARCH CORPORATION
Yezdi Dordi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cable Power Loss Determination For Virtual Metrology
Publication number
20150198639
Publication date
Jul 16, 2015
LAM RESEARCH CORPORATION
Arthur M. Howald
G01 - MEASURING TESTING
Information
Patent Application
PROCESSES AND SYSTEMS FOR ENGINEERING A COPPER SURFACE FOR SELECTIV...
Publication number
20140322446
Publication date
Oct 30, 2014
Yezdi Dordi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Segmenting A Model Within A Plasma System
Publication number
20140214395
Publication date
Jul 31, 2014
LAM RESEARCH CORPORATION
John C. Valcore
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Processes and Systems for Engineering a Barrier Surface for Copper...
Publication number
20120269987
Publication date
Oct 25, 2012
LAM RESEARCH CORPORATION
Yezdi Dordi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ANTENNA FOR PLASMA PROCESSOR AND APPARATUS
Publication number
20120248978
Publication date
Oct 4, 2012
LAM RESEARCH CORPORATION
Arthur M. HOWALD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTENNA FOR PLASMA PROCESSOR AND APPARATUS
Publication number
20110120653
Publication date
May 26, 2011
LAM RESEARCH CORPORATION
Arthur M. HOWALD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL METHODS FOR CLEANING POST-CMP WAFERS
Publication number
20100136788
Publication date
Jun 3, 2010
LAM RESEARCH CORPORATION
Zhonghui Alex Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF LOW-K DIELECTRIC AND METAL PROCESS INTEGRATION
Publication number
20090087980
Publication date
Apr 2, 2009
Yezdi N. DORDI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thermal methods for cleaning post-CMP wafers
Publication number
20080280456
Publication date
Nov 13, 2008
Lam Research Corporation
Zhonghui Alex Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Controlled ambient system for interface engineering
Publication number
20080057221
Publication date
Mar 6, 2008
LAM RESEARCH CORPORATION
John Boyd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR GAP FILL IN CONTROLLED AMBIENT SYSTEM
Publication number
20080057182
Publication date
Mar 6, 2008
John Boyd
H01 - BASIC ELECTRIC ELEMENTS