Arthur W. Zafiropoulo

Person

Atherton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of laser annealing a semiconductor wafer with localized cont...
- Patent number 9,613,828
- Issue date Apr 4, 2017
- Ultratech, Inc.
- James McWhirter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxygen radical enhanced atomic-layer deposition using ozone plasma
- Patent number 9,583,337
- Issue date Feb 28, 2017
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radical-enhanced atomic layer deposition using CF4 to enhance oxyge...
- Patent number 9,318,319
- Issue date Apr 19, 2016
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Betavoltaic power sources for transportation applications
- Patent number 9,266,437
- Issue date Feb 23, 2016
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Methods of laser processing photoresist in a gaseous environment
- Patent number 8,986,562
- Issue date Mar 24, 2015
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Betavoltaic power sources for mobile device applications
- Patent number 8,872,408
- Issue date Oct 28, 2014
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Systems for and methods of laser-enhanced plasma processing of semi...
- Patent number 8,796,151
- Issue date Aug 5, 2014
- Ultratech, Inc.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing scanning methods with reduced annealing non-uniform...
- Patent number 8,501,638
- Issue date Aug 6, 2013
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrically conductive structure on a semiconductor substrate form...
- Patent number 8,067,305
- Issue date Nov 29, 2011
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma-enhanced atomic layer deposition system with rotary reactor...
- Publication number 20170062191
- Publication date Mar 2, 2017
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of laser annealing a semiconductor wafer with localized cont...
- Publication number 20160343583
- Publication date Nov 24, 2016
- Ultratech, Inc.
- James McWhirter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND PROCESSES FOR FORMING THREE-DIMENSIONAL INTEGRATED CIRC...
- Publication number 20160240440
- Publication date Aug 18, 2016
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radical-enhanced atomic layer deposition using CF4 to enhance oxyge...
- Publication number 20160064208
- Publication date Mar 3, 2016
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Oxygen radical enhanced atomic-layer deposition using ozone plasma
- Publication number 20150279665
- Publication date Oct 1, 2015
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of laser processing photoresist in a gaseous environment
- Publication number 20150041431
- Publication date Feb 12, 2015
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods for material processing using light-emitting di...
- Publication number 20140238958
- Publication date Aug 28, 2014
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Betavoltaic power sources for transportation applications
- Publication number 20140021826
- Publication date Jan 23, 2014
- Arthur W. Zafiropoulo
- B60 - VEHICLES IN GENERAL
Information Patent Application
Betavoltaic power sources for mobile device applications
- Publication number 20130278109
- Publication date Oct 24, 2013
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Systems for and methods of laser-enhanced plasma processing of semi...
- Publication number 20130267096
- Publication date Oct 10, 2013
- ULTRATECH, INC.
- Andrew M. Hawryluk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal Processing of Substrates with Pre- and Post-Spike Temperatu...
- Publication number 20120111838
- Publication date May 10, 2012
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thermal Processing of Substrates with Pre- and Post-Spike Temperatu...
- Publication number 20110298093
- Publication date Dec 8, 2011
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND PROCESSES FOR FORMING THREE-DIMENSIONAL CIRCUITS
- Publication number 20110089523
- Publication date Apr 21, 2011
- Ultratech, Inc.
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and processes for forming three-dimensional circuits
- Publication number 20100140768
- Publication date Jun 10, 2010
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing of substrates with pre- and post-spike temperatu...
- Publication number 20100084744
- Publication date Apr 8, 2010
- Arthur W. Zafiropoulo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrically conductive structure on a semiconductor substrate form...
- Publication number 20100055895
- Publication date Mar 4, 2010
- Arthur W. Zafiropoulo
- H01 - BASIC ELECTRIC ELEMENTS

Arthur W. Zafiropoulo

Person

Patents Grantslast 30 patents

Method of laser annealing a semiconductor wafer with localized cont...

Oxygen radical enhanced atomic-layer deposition using ozone plasma

Radical-enhanced atomic layer deposition using CF4 to enhance oxyge...

Betavoltaic power sources for transportation applications

Methods of laser processing photoresist in a gaseous environment

Betavoltaic power sources for mobile device applications

Systems for and methods of laser-enhanced plasma processing of semi...

Laser annealing scanning methods with reduced annealing non-uniform...

Electrically conductive structure on a semiconductor substrate form...

Patents Applicationslast 30 patents

Plasma-enhanced atomic layer deposition system with rotary reactor...

Method of laser annealing a semiconductor wafer with localized cont...

SYSTEMS AND PROCESSES FOR FORMING THREE-DIMENSIONAL INTEGRATED CIRC...

Radical-enhanced atomic layer deposition using CF4 to enhance oxyge...

Oxygen radical enhanced atomic-layer deposition using ozone plasma

Methods of laser processing photoresist in a gaseous environment

Systems and methods for material processing using light-emitting di...

Betavoltaic power sources for transportation applications

Betavoltaic power sources for mobile device applications

Systems for and methods of laser-enhanced plasma processing of semi...

Thermal Processing of Substrates with Pre- and Post-Spike Temperatu...

Thermal Processing of Substrates with Pre- and Post-Spike Temperatu...

SYSTEMS AND PROCESSES FOR FORMING THREE-DIMENSIONAL CIRCUITS

Systems and processes for forming three-dimensional circuits

Thermal processing of substrates with pre- and post-spike temperatu...

Electrically conductive structure on a semiconductor substrate form...