Ashish SAURABH

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Portland, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Trim and deposition profile control with multi-zone heated substrat...
- Patent number 12,071,689
- Issue date Aug 27, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ACCURATE DETERMINATION OF RADIO FREQUENCY POWER THROUGH DIGITAL INV...
- Publication number 20230341448
- Publication date Oct 26, 2023
- LAM RESEARCH CORPORATION
- Ashish Saurabh
- G01 - MEASURING TESTING
Information Patent Application
TUNABLE AND NON-TUNABLE HEAT SHIELDS TO AFFECT TEMPERATURE DISTRIBU...
- Publication number 20220333239
- Publication date Oct 20, 2022
- LAM RESEARCH CORPORATION
- Ashish SAURABH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL
- Publication number 20220243332
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
- Publication number 20220205105
- Publication date Jun 30, 2022
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...