Atsuko Takafuji

Person

Nerima-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 8,604,430
- Issue date Dec 10, 2013
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of an inspection system using an electron beam
- Patent number 8,134,125
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,952,074
- Issue date May 31, 2011
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and apparatus using electron beam
- Patent number 7,439,504
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,439,506
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,417,444
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 7,397,031
- Issue date Jul 8, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
- Patent number 7,348,558
- Issue date Mar 25, 2008
- Hitachi, Ltd.
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 7,242,015
- Issue date Jul 10, 2007
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,232,996
- Issue date Jun 19, 2007
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 7,098,455
- Issue date Aug 29, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
- Patent number 7,030,394
- Issue date Apr 18, 2006
- Hitachi, Ltd.
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,026,830
- Issue date Apr 11, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,012,252
- Issue date Mar 14, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,987,265
- Issue date Jan 17, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 6,979,823
- Issue date Dec 27, 2005
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and apparatus using electron beam
- Patent number 6,940,069
- Issue date Sep 6, 2005
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
- Patent number 6,825,480
- Issue date Nov 30, 2004
- Hitachi, Ltd.
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Patterned wafer inspection method and apparatus therefor
- Patent number 6,797,954
- Issue date Sep 28, 2004
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...
- Patent number 6,768,113
- Issue date Jul 27, 2004
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection system and wafer inspection process using charged...
- Patent number 6,700,122
- Issue date Mar 2, 2004
- Hitachi, Ltd.
- Miyako Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and apparatus using electron beam
- Patent number 6,614,022
- Issue date Sep 2, 2003
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 6,583,413
- Issue date Jun 24, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,559,663
- Issue date May 6, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting patterns of a semiconductor dev...
- Patent number 6,512,227
- Issue date Jan 28, 2003
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...
- Patent number 6,509,564
- Issue date Jan 21, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern usin...
- Patent number 6,476,390
- Issue date Nov 5, 2002
- Hitachi, Ltd.
- Hisaya Murakoshi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,452,178
- Issue date Sep 17, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of inspecting a pattern on a substrate
- Patent number 6,376,854
- Issue date Apr 23, 2002
- Hitachi, Ltd.
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,348,690
- Issue date Feb 19, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...
- Publication number 20120132801
- Publication date May 31, 2012
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM
- Publication number 20090057556
- Publication date Mar 5, 2009
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN
- Publication number 20080302964
- Publication date Dec 11, 2008
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20070215803
- Publication date Sep 20, 2007
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus and automatic astigmatism adjustmen...
- Publication number 20060289751
- Publication date Dec 28, 2006
- Hitachi, Ltd
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting a circuit pattern and inspecting instrument
- Publication number 20060243908
- Publication date Nov 2, 2006
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20060151699
- Publication date Jul 13, 2006
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20060043982
- Publication date Mar 2, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Evaluation method and manufacturing method of semiconductor device
- Publication number 20060022295
- Publication date Feb 2, 2006
- Atsuko Takafuji
- G01 - MEASURING TESTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20060017014
- Publication date Jan 26, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection method and apparatus using electron beam
- Publication number 20050263703
- Publication date Dec 1, 2005
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20050205782
- Publication date Sep 22, 2005
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus and automatic astigmatism adjustmen...
- Publication number 20050092930
- Publication date May 5, 2005
- Hitachi, Ltd. Incorporation
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20040222377
- Publication date Nov 11, 2004
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection method and apparatus using electron beam
- Publication number 20040028272
- Publication date Feb 12, 2004
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting a circuit pattern and inspecting instrument
- Publication number 20030201391
- Publication date Oct 30, 2003
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20030169060
- Publication date Sep 11, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Patterned wafer inspection method and apparatus therefor
- Publication number 20030164460
- Publication date Sep 4, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030155508
- Publication date Aug 21, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030146382
- Publication date Aug 7, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece holder, semiconductor fabricating apparatus, semiconducto...
- Publication number 20030111616
- Publication date Jun 19, 2003
- Hitachi, Ltd.
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer inspection system and wafer inspection process using charged...
- Publication number 20020134936
- Publication date Sep 26, 2002
- Miyako Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNED WAFER INSPECTION METHOD AND APPARATUS THEREFOR
- Publication number 20020117635
- Publication date Aug 29, 2002
- HIROYUKI SHINADA
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20020092986
- Publication date Jul 18, 2002
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Pattern inspection method and apparatus using electron beam
- Publication number 20020030166
- Publication date Mar 14, 2002
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20020027440
- Publication date Mar 7, 2002
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting patterns of a semiconductor dev...
- Publication number 20020024021
- Publication date Feb 28, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting pattern and apparatus thereof
- Publication number 20010030300
- Publication date Oct 18, 2001
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20010030294
- Publication date Oct 18, 2001
- Hitachi, Ltd
- Yuko Iwabuchi
- G01 - MEASURING TESTING

Atsuko Takafuji

Person

Patents Grantslast 30 patents

Method and an apparatus of an inspection system using an electron beam

Method and apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Pattern inspection method and apparatus using electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Method of inspecting a circuit pattern and inspecting instrument

Charged particle beam apparatus and automatic astigmatism adjustmen...

Patterned wafer inspection method and apparatus therefor

Method and an apparatus of an inspection system using an electron beam

Method of inspecting a circuit pattern and inspecting instrument

Charged particle beam apparatus and automatic astigmatism adjustmen...

Method and apparatus for inspecting integrated circuit pattern

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Patterned wafer inspection method and apparatus therefor

Pattern inspection method and apparatus using electron beam

Charged particle beam apparatus and automatic astigmatism adjustmen...

Patterned wafer inspection method and apparatus therefor

WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...

Wafer inspection system and wafer inspection process using charged...

Pattern inspection method and apparatus using electron beam

Method of inspecting a circuit pattern and inspecting instrument

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting patterns of a semiconductor dev...

WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTO...

Method and apparatus for inspecting integrated circuit pattern usin...

Method and an apparatus of an inspection system using an electron beam

Method of inspecting a pattern on a substrate

Method and an apparatus of an inspection system using an electron beam

Patents Applicationslast 30 patents

METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...

METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM

METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN

Method and an apparatus of an inspection system using an electron beam

Charged particle beam apparatus and automatic astigmatism adjustmen...

Method of inspecting a circuit pattern and inspecting instrument

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting integrated circuit pattern

Evaluation method and manufacturing method of semiconductor device

Patterned wafer inspection method and apparatus therefor

Pattern inspection method and apparatus using electron beam

Method and an apparatus of an inspection system using an electron beam

Charged particle beam apparatus and automatic astigmatism adjustmen...

Patterned wafer inspection method and apparatus therefor

Pattern inspection method and apparatus using electron beam

Method of inspecting a circuit pattern and inspecting instrument

Method and apparatus for inspecting integrated circuit pattern

Patterned wafer inspection method and apparatus therefor

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Workpiece holder, semiconductor fabricating apparatus, semiconducto...

Wafer inspection system and wafer inspection process using charged...

PATTERNED WAFER INSPECTION METHOD AND APPARATUS THEREFOR

Method and an apparatus of an inspection system using an electron beam

Pattern inspection method and apparatus using electron beam

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting patterns of a semiconductor dev...

Method of inspecting pattern and apparatus thereof

Method and an apparatus of an inspection system using an electron beam