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Atsumi Yamaguchi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Evaluation method
Patent number
6,960,481
Issue date
Nov 1, 2005
Renesas Technology Corp.
Atsumi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing electronic device
Patent number
6,938,238
Issue date
Aug 30, 2005
Renesas Technology Corp.
Takashi Okagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a thinned gate electrode utilizing protecti...
Patent number
6,849,486
Issue date
Feb 1, 2005
Renesas Technology Corp.
Tetsuya Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
6,774,043
Issue date
Aug 10, 2004
Renesas Technology Corp.
Atsumi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Antireflection coating and semiconductor device manufacturing method
Patent number
6,607,992
Issue date
Aug 19, 2003
Mitsubishi Denki Kabushiki Kaisha
Kouichirou Tsujita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
6,518,196
Issue date
Feb 11, 2003
Mitsubishi Denki Kabushiki Kaisha
Tetsuya Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming resist pattern
Patent number
6,337,175
Issue date
Jan 8, 2002
Mitsubishi Denki Kabushiki Kaisha
Atsumi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming photomask and pattern and method of forming a sem...
Patent number
6,136,479
Issue date
Oct 24, 2000
Mitsubishi Denki Kabushiki Kaisha
Atsumi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
5,981,149
Issue date
Nov 9, 1999
Mitsubishi Denki Kabushiki Kaisha
Atsumi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and developer for developing a positive photoresist
Patent number
5,902,718
Issue date
May 11, 1999
Mitsubishi Denki Kabushiki Kaisha
Atsumi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method of forming resist pattern and semiconductor device manufactu...
Publication number
20080241489
Publication date
Oct 2, 2008
RENESAS TECHNOLOGY CORP.
Takeo Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20040102048
Publication date
May 27, 2004
Renesas Technology Corp.
Atsumi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing electronic device
Publication number
20040054981
Publication date
Mar 18, 2004
Mitsubishi Denki Kabushiki Kaisha
Takashi Okagawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Manufacturing method of semiconductor device
Publication number
20030216018
Publication date
Nov 20, 2003
Mitsubishi Denki Kabushiki Kaisha
Tetsuya Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Evaluation method
Publication number
20030129509
Publication date
Jul 10, 2003
Mitsubishi Denki Kabushiki Kaisha
Atsumi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Resist pattern hardening method
Publication number
20030087196
Publication date
May 8, 2003
Mitsubishi Denki Kabushiki Kaisha
Kouichirou Tsujita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of manufacturing semiconductor device
Publication number
20020160619
Publication date
Oct 31, 2002
Mitsubishi Denki Kabushiki Kaisha
Tetsuya Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Antireflection coating and semiconductor device manufacturing method
Publication number
20020123245
Publication date
Sep 5, 2002
Mitsubishi Denki Kabushiki Kaisha
Kouichirou Tsujita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing semiconductor device
Publication number
20020013055
Publication date
Jan 31, 2002
Mitsubishi Denki Kabushiki Kaisha
Atsumi Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS