Atsushi Anamoto

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,591,935
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,573,539
- Issue date Feb 25, 2020
- Tokyo Electron Limited
- Hiroshi Komiya
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,162,371
- Issue date Dec 25, 2018
- Tokyo Electron Limited
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240128101
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Atsushi ANAMOTO
- G05 - CONTROLLING REGULATING
Information Patent Application
FILTER CLEANING SYSTEM AND FILTER CLEANING METHOD
- Publication number 20230091875
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Yuki OTSUKA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230005763
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20190079544
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180358240
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Hiroshi Komiya
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20150131403
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Yasuhiro Takaki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL