Atsushi Endo

Person

Kai-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 12,191,140
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Yutaka Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and processing method
- Patent number 12,173,405
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication process flow of dielectric layer for isolation of nano-...
- Patent number 11,605,712
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Shimpei Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming polysilicon film and film forming apparatus
- Patent number 11,062,904
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Yutaka Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a protective film
- Patent number 10,458,016
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective film forming method
- Patent number 10,170,300
- Issue date Jan 1, 2019
- Tokyo Electron Limited
- Shogo Tsukazawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Recess filling method and processing apparatus
- Patent number 9,824,919
- Issue date Nov 21, 2017
- Tokyo Electron Limited
- Yoichiro Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method
- Patent number 9,777,366
- Issue date Oct 3, 2017
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method of operating the same
- Patent number 9,279,183
- Issue date Mar 8, 2016
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film forming method and film forming apparatus
- Patent number 9,145,604
- Issue date Sep 29, 2015
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method of operating the same
- Patent number 8,993,456
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming oxide film on carbon film
- Patent number 8,518,834
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Akinobu Kakimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat processing apparatus for semiconductor process
- Patent number 8,002,895
- Issue date Aug 23, 2011
- Tokyo Electron Limited
- Hisashi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,604,010
- Issue date Oct 20, 2009
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical heat processing apparatus and method for using the same
- Patent number 7,575,431
- Issue date Aug 18, 2009
- Tokyo Electron Limited
- Atsushi Endo
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Semiconductor processing apparatus and method
- Patent number 7,559,992
- Issue date Jul 14, 2009
- Tokyo Electron Limited
- Daisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of preparing a pigment composition
- Patent number 7,494,542
- Issue date Feb 24, 2009
- Toyo Ink Mfg. Co., Ltd.
- Atsushi Endo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Process tube for manufacturing semiconductor wafers
- Patent number D586768
- Issue date Feb 17, 2009
- Tokyo Electron Limited
- Hisashi Inoue
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,470,637
- Issue date Dec 30, 2008
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,368,384
- Issue date May 6, 2008
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon nitride film forming method, silicon nitride film forming s...
- Patent number 7,156,923
- Issue date Jan 2, 2007
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precleaning method of precleaning a silicon nitride film forming sy...
- Patent number 6,844,273
- Issue date Jan 18, 2005
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Information processing apparatus, information processing method, an...
- Patent number 6,519,701
- Issue date Feb 11, 2003
- Sony Corporation
- Harumi Kawamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Stream information processing and method and providing medium
- Patent number 6,493,769
- Issue date Dec 10, 2002
- Sony Corporation
- Harumi Kawamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for transmitting/receiving signal level data
- Patent number 6,341,319
- Issue date Jan 22, 2002
- Sony Corporation
- Hiraku Inoue
- G11 - INFORMATION STORAGE
Information Patent Grant
Process for the production of metal phthalocyanine
- Patent number 6,103,896
- Issue date Aug 15, 2000
- Toyo Ink Manufacturing Co., Ltd.
- Atsushi Endo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Process for the production of copper phthalocyanine
- Patent number 5,910,585
- Issue date Jun 8, 1999
- Toyo Ink Manufacturing Co., Ltd.
- Atsushi Endo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for dispersing pigment and water-based pigment dispersion
- Patent number 5,635,552
- Issue date Jun 3, 1997
- Toyo Ink Manufacturing Co., Ltd.
- Atsushi Endo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Water-based pigment dispersion
- Patent number 5,476,544
- Issue date Dec 19, 1995
- Toyo Ink Manufacturing Co., Ltd.
- Atsushi Endo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Pigment dispersing agent and its use
- Patent number 5,420,187
- Issue date May 30, 1995
- Toyo Ink Manufacturing Co., Ltd.
- Atsushi Endo
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20250066916
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hiroki IRIUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20220384184
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Yutaka MOTOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20220081771
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Hiroki IRIUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS
- Publication number 20220010424
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Yusuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATION PROCESS FLOW OF DIELECTRIC LAYER FOR ISOLATION OF NANO-...
- Publication number 20210375684
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Shimpei YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD FOR FORMING INNER SPACERS IN A NANO-SHE...
- Publication number 20210376123
- Publication date Dec 2, 2021
- TOKYO ELECTRON LIMITED
- Shimpei YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING POLYSILICON FILM AND FILM FORMING APPARATUS
- Publication number 20200161130
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Yutaka MOTOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20190237326
- Publication date Aug 1, 2019
- TOKYO ELECTRON LIMITED
- Takayuki KOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECESS FILLING METHOD AND PROCESSING APPARATUS
- Publication number 20170256450
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Yoichiro CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A PROTECTIVE FILM
- Publication number 20170182514
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Takeshi KUMAGAI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20150270126
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING SILICON OXIDE FILM AND SILICON NITRIDE FILM AN...
- Publication number 20140308820
- Publication date Oct 16, 2014
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20130109196
- Publication date May 2, 2013
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME
- Publication number 20130109195
- Publication date May 2, 2013
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20130084693
- Publication date Apr 4, 2013
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF DEPOSITING SILICON OXIDE FILM AND SILICON NITRIDE FILM, F...
- Publication number 20120252224
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL BATCH-TYPE FILM FORMING APPARATUS
- Publication number 20120247391
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING OXIDE FILM ON CARBON FILM
- Publication number 20120164844
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING A THIN FILM FORMING APPARATUS, THIN FILM FORMING...
- Publication number 20120015525
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Atsushi ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat processing apparatus for semiconductor process
- Publication number 20080083372
- Publication date Apr 10, 2008
- Hisashi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM TRANSISTOR ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF...
- Publication number 20080035933
- Publication date Feb 14, 2008
- MITSUBISHI ELECTRIC CORPORATION
- Hitoshi Nagata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical heat processing apparatus and method for using the same
- Publication number 20080008566
- Publication date Jan 10, 2008
- Atsushi Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of preparing a pigment composition
- Publication number 20070272125
- Publication date Nov 29, 2007
- TOYO INK MFG. CO., LTD.
- Atsushi Endo
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SWITCHING ELEMENT FOR CHARACTERISTIC INSPECTION, AND CHARACTERISTIC...
- Publication number 20060273422
- Publication date Dec 7, 2006
- Mitsubishi Denki Kabushiki Kaisha
- Atsushi ENDO
- G02 - OPTICS
Information Patent Application
Semiconductor processing apparatus and method
- Publication number 20060134811
- Publication date Jun 22, 2006
- Daisuke Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of cleaning thin film deposition system, thin film depositio...
- Publication number 20060081182
- Publication date Apr 20, 2006
- TOKYO ELECTRON LIMITED
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20060068598
- Publication date Mar 30, 2006
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20060042544
- Publication date Mar 2, 2006
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing system and operating method of processing system
- Publication number 20050284575
- Publication date Dec 29, 2005
- TOKYO ELECTRON LIMITED
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20050245099
- Publication date Nov 3, 2005
- Atsushi Endo
- B08 - CLEANING

Atsushi Endo

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device and substrate process...

Processing apparatus and processing method

Fabrication process flow of dielectric layer for isolation of nano-...

Method of forming polysilicon film and film forming apparatus

Method for forming a protective film

Protective film forming method

Recess filling method and processing apparatus

Thin film forming method

Film forming apparatus and method of operating the same

Thin film forming method and film forming apparatus

Film forming apparatus and method of operating the same

Method and apparatus for forming oxide film on carbon film

Heat processing apparatus for semiconductor process

Film formation apparatus and method of using the same

Vertical heat processing apparatus and method for using the same

Semiconductor processing apparatus and method

Method of preparing a pigment composition

Process tube for manufacturing semiconductor wafers

Film formation apparatus and method of using the same

Film formation apparatus and method of using the same

Silicon nitride film forming method, silicon nitride film forming s...

Precleaning method of precleaning a silicon nitride film forming sy...

Information processing apparatus, information processing method, an...

Stream information processing and method and providing medium

System and method for transmitting/receiving signal level data

Process for the production of metal phthalocyanine

Process for the production of copper phthalocyanine

Method for dispersing pigment and water-based pigment dispersion

Water-based pigment dispersion

Pigment dispersing agent and its use

Patents Applicationslast 30 patents

PROCESSING APPARATUS AND PROCESSING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

PROCESSING APPARATUS AND PROCESSING METHOD

FILM FORMING METHOD AND SEMICONDUCTOR PRODUCTION APPARATUS

FABRICATION PROCESS FLOW OF DIELECTRIC LAYER FOR ISOLATION OF NANO-...

SUBSTRATE PROCESSING METHOD FOR FORMING INNER SPACERS IN A NANO-SHE...

METHOD OF FORMING POLYSILICON FILM AND FILM FORMING APPARATUS

SELECTIVE FILM FORMING METHOD AND FILM FORMING APPARATUS

RECESS FILLING METHOD AND PROCESSING APPARATUS

METHOD FOR FORMING A PROTECTIVE FILM

THIN FILM FORMING METHOD

METHOD OF DEPOSITING SILICON OXIDE FILM AND SILICON NITRIDE FILM AN...

FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME

FILM FORMING APPARATUS AND METHOD OF OPERATING THE SAME

THIN FILM FORMING METHOD AND FILM FORMING APPARATUS

METHOD OF DEPOSITING SILICON OXIDE FILM AND SILICON NITRIDE FILM, F...

VERTICAL BATCH-TYPE FILM FORMING APPARATUS

METHOD AND APPARATUS FOR FORMING OXIDE FILM ON CARBON FILM

METHOD OF CLEANING A THIN FILM FORMING APPARATUS, THIN FILM FORMING...

Heat processing apparatus for semiconductor process

THIN FILM TRANSISTOR ARRAY SUBSTRATE, MANUFACTURING METHOD THEREOF...

Vertical heat processing apparatus and method for using the same

Method of preparing a pigment composition

SWITCHING ELEMENT FOR CHARACTERISTIC INSPECTION, AND CHARACTERISTIC...

Semiconductor processing apparatus and method

Method of cleaning thin film deposition system, thin film depositio...

Film formation apparatus and method of using the same

Film formation apparatus and method of using the same

Processing system and operating method of processing system

Film formation apparatus and method of using the same