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Atsushi Fukuroda
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Kawasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing apparatus and polishing method
Patent number
5,904,609
Issue date
May 18, 1999
Fujitsu Limited
Atsushi Fukuroda
G05 - CONTROLLING REGULATING
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Patent Grant
SOI device having a buried layer of reduced resistivity
Patent number
5,621,239
Issue date
Apr 15, 1997
Fujitsu Limited
Hiroshi Horie
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of and apparatus for manufacturing a semiconductor substrate
Patent number
5,399,233
Issue date
Mar 21, 1995
Fujitsu Limited
Maki Murazumi
H01 - BASIC ELECTRIC ELEMENTS