Atsushi Tonai

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Patents Grantslast 30 patents

Information Patent Grant
Process for producing integrated circuit, and substrate with integr...
- Patent number 7,163,892
- Issue date Jan 16, 2007
- Catalysts & Chemicals Industries Co., Ltd.
- Atsushi Tonai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating liquid for forming a silica-containing film with a low-diel...
- Patent number 6,562,465
- Issue date May 13, 2003
- Catalysts & Chemicals Industries Co., Ltd.
- Akira Nakashima
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate flattening method and film-coated substrate made thereby
- Patent number 6,340,641
- Issue date Jan 22, 2002
- Catalysts & Chemicals Industries Co., Ltd.
- Ryo Muraguchi
- G11 - INFORMATION STORAGE
Information Patent Grant
Thin film-forming method and thin film-forming apparatus therefor
- Patent number 6,086,699
- Issue date Jul 11, 2000
- Catalysts & Chemicals Industries Co., Ltd.
- Akira Nakashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of manufacturing integrated circuit, and substrate with inte...
- Publication number 20030157272
- Publication date Aug 21, 2003
- Atsushi Tonai
- H01 - BASIC ELECTRIC ELEMENTS